AMAT Applied Materials 0190-18128遙控 I/O 模塊
1.產(chǎn) 品 資 料 介 紹：
- 多類型信號兼容采集：支持模擬量（如 4-20mA 電流信號、0-10V 電壓信號）與數(shù)字量（開關(guān)量、脈沖信號）的同步采集，可同時對接設(shè)備傳感器（如壓力傳感器、流量傳感器）、執(zhí)行器（如電磁閥、伺服電機）的信號需求，無需額外信號轉(zhuǎn)換模塊，簡化設(shè)備布線與集成流程。
- 高精度信號傳輸能力：模擬量信號采集精度達 ±0.1% F.S.，數(shù)字量信號響應(yīng)延遲控制在微秒級，能精準(zhǔn)捕捉半導(dǎo)體制程中細(xì)微的信號變化（如工藝腔壓力波動、氣體流量微調(diào)），為設(shè)備控制系統(tǒng)提供真實、可靠的底層數(shù)據(jù)支撐，避免因信號失真導(dǎo)致的工藝偏差。
- 抗干擾信號隔離設(shè)計：采用光電隔離與電磁屏蔽雙重防護技術(shù)，模擬量通道隔離電壓≥2500V AC，數(shù)字量通道隔離電壓≥1500V AC，可有效抵御半導(dǎo)體設(shè)備運行中高頻電機、高壓電源產(chǎn)生的電磁干擾，確保信號在復(fù)雜電磁環(huán)境下仍能穩(wěn)定傳輸，降低誤觸發(fā)風(fēng)險。
- 寬溫穩(wěn)定運行特性：工作溫度范圍覆蓋 - 40℃~70℃，能適應(yīng)半導(dǎo)體潔凈車間與設(shè)備內(nèi)部的溫度差異（如靠近加熱腔的高溫區(qū)域、氣體冷卻系統(tǒng)附近的低溫區(qū)域），且在溫度劇烈波動時，模塊核心元器件性能衰減率低于 5%，保障信號處理功能持續(xù)穩(wěn)定。
- 高防護等級結(jié)構(gòu)：外殼采用 IP65 防護標(biāo)準(zhǔn)，搭配密封式端子接口，可有效阻擋潔凈車間的粉塵、腐蝕性氣體（如刻蝕工藝中的氟化物殘留）侵入模塊內(nèi)部，同時具備一定的防水能力，避免設(shè)備維護時少量清潔液體滲入導(dǎo)致短路，延長模塊使用壽命。
- 抗振動與沖擊性能：通過軍用級振動測試（10-500Hz，10g 加速度）與沖擊測試（50g 峰值加速度，11ms 脈沖），能耐受半導(dǎo)體設(shè)備運行中機械傳動部件（如機械臂、晶圓傳輸機構(gòu)）產(chǎn)生的振動與瞬時沖擊，防止模塊內(nèi)部焊點脫落、線路松動，確保長期可靠運行。
AMAT Applied Materials 0190-18128遙控 I/O 模塊 英文資料：
1、 High reliability signal processing: adapted to the precise control requirements of semiconductor equipment
As the "signal transmission center" of semiconductor equipment, this remote control I/O module exhibits strong adaptability and stability in signal processing, with core features reflected in the following three aspects:
Multi type signal compatible acquisition: Supports synchronous acquisition of analog signals (such as 4-20mA current signals, 0-10V voltage signals) and digital signals (switch signals, pulse signals), and can simultaneously interface with device sensors (such as pressure sensors, flow sensors) and actuators (such as solenoid valves, servo motors) for signal requirements, without the need for additional signal conversion modules, simplifying device wiring and integration processes.
High precision signal transmission capability: The analog signal acquisition accuracy reaches ± 0.1% F.S., and the digital signal response delay is controlled at the microsecond level, which can accurately capture subtle signal changes in semiconductor processes (such as process chamber pressure fluctuations and gas flow fine-tuning), providing real and reliable underlying data support for equipment control systems and avoiding process deviations caused by signal distortion.
Anti interference signal isolation design: Adopting dual protection technology of photoelectric isolation and electromagnetic shielding, the isolation voltage of analog channels is ≥ 2500V AC, and the isolation voltage of digital channels is ≥ 1500V AC, which can effectively resist electromagnetic interference generated by high-frequency motors and high-voltage power supplies during the operation of semiconductor equipment, ensuring stable signal transmission in complex electromagnetic environments and reducing the risk of false triggering.
2、 Strict environmental tolerance: suitable for extreme working conditions in semiconductor manufacturing
Based on AMAT's specialized design for the semiconductor industry, this module has outstanding environmental adaptability and can cope with multiple harsh conditions during equipment operation:
Wide temperature stable operation characteristics: The working temperature range covers -40 ℃~70 ℃, which can adapt to temperature differences between semiconductor clean rooms and equipment interiors (such as high temperature areas near heating chambers and low temperature areas near gas cooling systems). In addition, during severe temperature fluctuations, the performance degradation rate of module core components is less than 5%, ensuring the continuous stability of signal processing functions.
High protection level structure: The shell adopts IP65 protection standard and is equipped with sealed terminal interfaces, which can effectively prevent dust and corrosive gases (such as fluoride residues in etching process) from entering the module interior in the clean workshop. At the same time, it has a certain waterproof ability to avoid short circuits caused by a small amount of cleaning liquid infiltration during equipment maintenance, and extend the service life of the module.
Anti vibration and impact performance: Through military grade vibration testing (10-500Hz, 10g acceleration) and impact testing (50g peak acceleration, 11ms pulse), it can withstand the vibration and instantaneous impact generated by mechanical transmission components (such as robotic arms and wafer transfer mechanisms) during the operation of semiconductor equipment, prevent the detachment of solder joints and loose circuits inside the module, and ensure long-term reliable operation.
AMAT Applied Materials 0190-18128遙控 I/O 模塊 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
