LAM  810-073479-215 控制板

1.產(chǎn) 品 資 料 介 紹：

中文資料：

LAM 810-073479-215 控制板主要應(yīng)用于半導(dǎo)體制造及高精度工業(yè)控制領(lǐng)域，廣泛用于以下行業(yè)和設(shè)備：

1. 半導(dǎo)體制造

• 蝕刻設(shè)備（Etching Systems）： 作為核心控制單元，管理等離子蝕刻過程中的電源、氣體流量、溫度等關(guān)鍵參數(shù)。
• 化學(xué)氣相沉積（CVD）設(shè)備： 通過精準的氣體和溫控控制，確保薄膜沉積質(zhì)量。
• 物理氣相沉積（PVD）設(shè)備： 保障濺射沉積過程中功率和氣壓的穩(wěn)定性。

2. 顯示面板生產(chǎn)

• OLED/LCD制程設(shè)備： 用于控制蝕刻、沉積、清洗等關(guān)鍵工藝，提高顯示面板的良品率。
• 光刻設(shè)備（Photolithography）： 負責(zé)精準運動控制和光學(xué)系統(tǒng)管理，確保微細圖形的曝光精度。

3. 精密工業(yè)自動化

• 高精度機床： 參與數(shù)控加工設(shè)備的電源管理、信號處理及運動控制。
• 電子封裝與測試設(shè)備： 保障封裝過程的溫度、壓力和對位精度，確保半導(dǎo)體封裝質(zhì)量。

4. 真空及等離子處理設(shè)備

• 等離子清洗系統(tǒng)： 監(jiān)測和控制等離子能量，優(yōu)化清洗效果。
• 真空鍍膜設(shè)備： 維持真空環(huán)境的穩(wěn)定性，提高鍍膜均勻度。

該控制板在需要高精度、穩(wěn)定性和可靠性的工業(yè)控制應(yīng)用中具有重要作用，是LAM Research 設(shè)備中的關(guān)鍵組件。

英文資料：

The LAM 810-073479-215 control board is mainly used in the fields of semiconductor manufacturing and high-precision industrial control, and is widely used in the following industries and equipment:

1. Semiconductor manufacturing

Etching Systems: As the core control unit, it manages key parameters such as power supply, gas flow rate, and temperature during the plasma etching process.

Chemical vapor deposition (CVD) equipment: ensures the quality of thin film deposition through precise gas and temperature control.

Physical vapor deposition (PVD) equipment: ensures the stability of power and gas pressure during the sputtering deposition process.

2. Display panel production

OLED/LCD process equipment: used to control key processes such as etching, deposition, and cleaning to improve the yield of display panels.

Photolithography equipment: Responsible for precise motion control and optical system management to ensure the exposure accuracy of fine graphics.

3. Precision industrial automation

High precision machine tools: participate in power management, signal processing, and motion control of CNC machining equipment.

Electronic packaging and testing equipment: ensuring temperature, pressure, and alignment accuracy during the packaging process to ensure the quality of semiconductor packaging.

4. Vacuum and plasma processing equipment

Plasma cleaning system: Monitor and control plasma energy to optimize cleaning effectiveness.

Vacuum coating equipment: Maintain the stability of the vacuum environment and improve the uniformity of coating.

This control board plays an important role in industrial control applications that require high precision, stability, and reliability, and is a key component in LAM Research equipment.

2.產(chǎn)      品      展      示      

3.其他產(chǎn)品

KB KBLC-120 直流控制器

jetter JM-204-480-JC310-S1伺服驅(qū)動器

COMPRESSOR MCP-1004 電路控制板

4.其他英文產(chǎn)品

ABB XTB750B01 output module

Asea EB0524B01 driver input power board

ABB UN1024c-P Remote Terminal Module