AMAT Applied Materials 0021-96788氣動(dòng)模塊
1.產(chǎn) 品 資 料 介 紹：
核心規(guī)格
功能特點(diǎn)
典型應(yīng)用
AMAT Applied Materials 0021-96788氣動(dòng)模塊 英文資料：
AMAT Applied Materials 0021-96788 is a modular pneumatic module primarily used for gas distribution and transmission control in wafer manufacturing equipment, compatible with platforms such as Centura and Endura.
Core specifications
Project specification remarks
Suitable for multi chamber semiconductor manufacturing systems such as Centura, Endura, P5000, etc
Functional positioning: Gas distribution and transmission control for process gas, purge gas, and control gas
Interface type G1/2 "(BSPP) or NPT self sealing joint partial versions support direct connection
Maximum working pressure 6.9 bar (100 psi) for non vacuum applications
Flow coefficient Cv 1.6 standard configuration
Working temperature -28.9 ℃~65.6 ℃ requires dry and clean compressed air
Material: anodized aluminum alloy body; Stainless steel valve components; Nitrile rubber seal is corrosion-resistant and wear-resistant
Installation method: direct installation or installation through a tool tray for easy maintenance and replacement
Features
Fast switching and low leakage: Adopting a self sealing interface design, the gas source can be quickly cut off when replacing tools or modules, reducing gas waste and pollution risks.
Multi channel integration: capable of managing multiple gas paths simultaneously, supporting independent distribution of process gas, purge gas, and control gas.
High reliability: Compact structure, suitable for high cleanliness and frequent start stop requirements in wafer manufacturing environment.
Flexible configuration: Supports different interface combinations and valve group configurations to meet diverse process requirements.
Typical Applications
Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD) Systems
Etch and ion implantation system
Wafer Transfer and Load/Unload Module
Gas mixing and flow control unit
AMAT Applied Materials 0021-96788氣動(dòng)模塊 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
