AMAT Applied Materials 9101-1745伺服驅(qū)動(dòng)器

1.產(chǎn) 品 資 料 介 紹：

AMAT Applied Materials 9101-1745 伺服驅(qū)動(dòng)器

核心技術(shù)參數(shù)

產(chǎn)品特點(diǎn)

• 高精度控制：采用先進(jìn)的伺服控制算法，實(shí)現(xiàn)納米級(jí)定位精度
• 快速響應(yīng)：高速處理器與優(yōu)化控制環(huán)路，確保動(dòng)態(tài)響應(yīng)迅速
• 穩(wěn)定可靠：工業(yè)級(jí)設(shè)計(jì)，適應(yīng)半導(dǎo)體設(shè)備嚴(yán)苛工作環(huán)境
• 靈活配置：支持多種控制模式和反饋類型，滿足不同應(yīng)用需求
• 完善保護(hù)：全面的電氣保護(hù)功能，確保設(shè)備安全運(yùn)行

典型應(yīng)用

• 晶圓傳輸機(jī)器人的精確位置控制
• 光刻機(jī)工作臺(tái)的高速定位系統(tǒng)
• 刻蝕 / 沉積設(shè)備的精密運(yùn)動(dòng)機(jī)構(gòu)
• 檢測(cè)設(shè)備的自動(dòng)對(duì)準(zhǔn)系統(tǒng)

安裝與維護(hù)建議

1. 安裝前準(zhǔn)備
   • 確認(rèn)電源規(guī)格與驅(qū)動(dòng)器匹配
   • 檢查電機(jī)參數(shù)與驅(qū)動(dòng)器設(shè)置一致
   • 確認(rèn)編碼器類型與接線正確
2. 調(diào)試要點(diǎn)
   • 先進(jìn)行電機(jī)識(shí)別和參數(shù)自整定
   • 逐步調(diào)整控制參數(shù)，優(yōu)化動(dòng)態(tài)性能
   • 設(shè)置合理的軟限位和保護(hù)參數(shù)

AMAT Applied Materials 9101-1745伺服驅(qū)動(dòng)器 英文資料：

AMAT Applied Materials 9101-1745 Servo Drive

AMAT 9101-1745 is a high-performance servo driver designed specifically for semiconductor manufacturing equipment, used for precise control of servo motors to achieve high-precision motion control of wafer transfer systems, robotic arms, and precision positioning mechanisms.

Core technical parameters

Project specifications

Three control modes: position, speed, and torque

Motor type supports DC/AC servo motors

Feedback Interface Encoder Interface (Incremental/Absolute)

Communication interface RS-485/Industrial Ethernet (by model)

Power supply voltage 24-48VDC or 200-240VAC

The control accuracy can reach 1/1000 of the encoder resolution

Protection function: overcurrent/overvoltage/overheating/overload protection

Working environment 0-55 ° C, relative humidity 20-80%

Product Features

High precision control: using advanced servo control algorithms to achieve nanometer level positioning accuracy

Fast response: High speed processor and optimized control loop ensure rapid dynamic response

Stable and reliable: Industrial grade design, suitable for harsh working environments of semiconductor equipment

Flexible configuration: supports multiple control modes and feedback types to meet different application needs

Complete protection: Comprehensive electrical protection function to ensure safe operation of equipment

Typical Applications

Accurate position control of wafer transfer robot

High speed positioning system for lithography machine workbench

Precision motion mechanism of etching/deposition equipment

Automatic alignment system for detection equipment

Installation and maintenance recommendations

Pre-installation preparation

Confirm that the power specifications match the driver

Check that the motor parameters are consistent with the driver settings

Confirm that the encoder type and wiring are correct

Debugging points

First, perform motor identification and parameter self-tuning

Gradually adjust control parameters to optimize dynamic performance

Set reasonable soft limit and protection parameters

AMAT Applied Materials  9101-1745伺服驅(qū)動(dòng)器 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218