AMAT Applied Materials 0190-36109驅(qū)動器組件

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT 0190-36109 驅(qū)動器組件是 Applied Materials 半導(dǎo)體設(shè)備中的關(guān)鍵電氣控制模塊，主要用于為執(zhí)行器、電機(jī)、閥門等工藝設(shè)備的驅(qū)動單元提供電力和控制信號。該組件能夠精確控制運(yùn)動或動作的速度、位置和力矩，保證設(shè)備在沉積、刻蝕或其他工藝過程中實現(xiàn)高精度操作，是工藝設(shè)備自動化可靠運(yùn)行的重要組成部分。

技術(shù)參數(shù)（典型特征）

• 類型：驅(qū)動器組件 / Driver Assembly

• 功能：驅(qū)動電機(jī)、閥門或執(zhí)行器，提供精確動作控制

• 控制方式：數(shù)字或模擬信號控制，支持閉環(huán)反饋

• 輸出特性：電流、電壓或脈沖輸出，用于驅(qū)動執(zhí)行單元

• 接口類型：電氣接口，可與控制器、操作面板或接口模塊聯(lián)動

• 工作環(huán)境：潔凈室兼容，耐高溫、抗振動

• 兼容設(shè)備：Applied Materials 各類沉積（CVD/PVD）、刻蝕（Etch）、離子注入及熱處理設(shè)備

應(yīng)用場景

1. 執(zhí)行器和閥門控制

   • 控制氣動或電動閥門、夾持器等執(zhí)行機(jī)構(gòu)的開閉和位置調(diào)節(jié)。

2. 電機(jī)驅(qū)動

   • 控制旋轉(zhuǎn)或直線電機(jī)，實現(xiàn)晶圓搬運(yùn)、工藝板移動或機(jī)械動作。

3. 工藝動作精度保障

   • 提供穩(wěn)定驅(qū)動力，確保設(shè)備在工藝過程中動作精準(zhǔn)、一致。

4. 設(shè)備維護(hù)與模塊替換

   • 模塊化設(shè)計便于拆裝和更換，提高維護(hù)效率并減少停機(jī)時間。

產(chǎn)品優(yōu)勢

• 動作控制精確：提供精確的速度、位置和力矩控制，提升工藝一致性。

• 可靠性高：耐高溫、抗振動，適應(yīng)半導(dǎo)體生產(chǎn)環(huán)境。

• 模塊化設(shè)計：便于安裝、拆卸和更換，提高設(shè)備維護(hù)效率。

• 兼容性強(qiáng)：可與多種 AMAT 控制系統(tǒng)和執(zhí)行單元配合使用。

• 支持閉環(huán)控制：與傳感器反饋配合，實現(xiàn)精確動作和自動化控制。

AMAT Applied Materials 0190-36109驅(qū)動器組件 英文資料：

Product Overview

The AMAT 0190-36109 driver component is a key electrical control module in Applied Materials semiconductor equipment, mainly used to provide power and control signals for the drive units of process equipment such as actuators, motors, valves, etc. This component can accurately control the speed, position, and torque of motion or action, ensuring high-precision operation of the equipment during deposition, etching, or other processes. It is an important component of process equipment automation and reliable operation.

Technical parameters (typical features)

Type: Driver Assembly

Function: Drive motors, valves, or actuators to provide precise motion control

Control mode: digital or analog signal control, supporting closed-loop feedback

Output characteristics: current, voltage or pulse output, used to drive the execution unit

Interface type: Electrical interface, can be linked with controller, operation panel or interface module

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, and heat treatment equipment

Application scenarios

Actuator and valve control

Control the opening, closing, and position adjustment of pneumatic or electric valves, clamps, and other actuators.

motor drive

Control rotary or linear motors to achieve wafer handling, process board movement, or mechanical actions.

Process action accuracy guarantee

Provide stable driving force to ensure precise and consistent operation of the equipment during the manufacturing process.

Equipment maintenance and module replacement

Modular design facilitates disassembly and replacement, improves maintenance efficiency, and reduces downtime.

Product advantages

Accurate motion control: providing precise speed, position, and torque control to enhance process consistency.

High reliability: resistant to high temperatures, vibration, and suitable for semiconductor production environments.

Modular design: easy to install, disassemble, and ｒｅｐｌａｃｅ, improving equipment maintenance efficiency.

Strong compatibility: Can be used in conjunction with various AMAT control systems and execution units.

Support closed-loop control: in conjunction with sensor feedback, achieve precise action and automated control.

AMAT Applied Materials  0190-36109驅(qū)動器組件 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218