AMAT Applied Materials 0190-35252氣動室組件

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT 0190-35252 氣動室組件是 Applied Materials 半導(dǎo)體設(shè)備中用于氣動控制的關(guān)鍵模塊。該組件主要用于管理和調(diào)節(jié)工藝設(shè)備中氣體的流動和壓力，為閥門、執(zhí)行器及其他氣動子系統(tǒng)提供穩(wěn)定的氣壓環(huán)境，確保半導(dǎo)體工藝設(shè)備的精準(zhǔn)操作和安全運行。氣動室組件是連接氣源與工藝模塊的核心接口，保證設(shè)備的氣動系統(tǒng)穩(wěn)定和工藝重復(fù)性。

技術(shù)參數(shù)（典型特征）

• 類型：氣動室組件 / Pneumatic Chamber Assembly

• 功能：氣壓調(diào)節(jié)、氣體分配、執(zhí)行氣動控制

• 接口類型：氣體輸入輸出接口，兼容多路氣體連接

• 控制方式：可與電磁閥或氣動執(zhí)行器配合，實現(xiàn)精確控制

• 工作環(huán)境：潔凈室兼容，耐腐蝕、耐高壓

• 適用設(shè)備：Applied Materials CVD、PVD、Etch、Ion Implant 等半導(dǎo)體工藝設(shè)備

• 氣壓范圍：根據(jù)工藝需求設(shè)計，支持低壓到高壓氣動控制

應(yīng)用場景

1. 工藝氣體流量和壓力控制

   • 調(diào)節(jié)氣體供應(yīng)壓力和流量，確保工藝模塊按設(shè)定條件運行。

2. 氣動閥門和執(zhí)行器驅(qū)動

   • 為閥門、夾持器或其他氣動裝置提供穩(wěn)定氣源，實現(xiàn)精確動作。

3. 工藝穩(wěn)定性保障

   • 保證氣體供應(yīng)穩(wěn)定，提升沉積、刻蝕或離子注入工藝的重復(fù)性。

4. 設(shè)備維護和模塊替換

   • 模塊化設(shè)計便于拆裝和更換，減少設(shè)備停機時間。

產(chǎn)品優(yōu)勢

• 氣壓控制精確：保證氣動系統(tǒng)穩(wěn)定運行，提升工藝一致性。

• 高可靠性：耐高壓、耐腐蝕，適應(yīng)半導(dǎo)體工藝環(huán)境。

• 模塊化設(shè)計：便于安裝、維護和升級，提高設(shè)備可用性。

• 兼容性強：支持與多種 AMAT 氣動控制系統(tǒng)和工藝模塊配合使用。

• 工藝安全性高：穩(wěn)定氣動環(huán)境，降低設(shè)備故障和操作風(fēng)險。

AMAT Applied Materials 0190-35252氣動室組件 英文資料：

Product Overview

AMAT 0190-35252 Pneumatic Chamber Component is a key module used for pneumatic control in Applied Materials semiconductor equipment. This component is mainly used to manage and regulate the flow and pressure of gases in process equipment, providing a stable pneumatic environment for valves, actuators, and other pneumatic subsystems, ensuring the precise operation and safe operation of semiconductor process equipment. The pneumatic chamber component is the core interface connecting the gas source and the process module, ensuring the stability of the pneumatic system and the repeatability of the process of the equipment.

Technical parameters (typical features)

Type: Pneumatic Chamber Assembly

Function: Air pressure regulation, gas distribution, pneumatic control execution

Interface type: Gas input/output interface, compatible with multiple gas connections

Control method: Can be combined with solenoid valves or pneumatic actuators to achieve precise control

Work environment: cleanroom compatible, corrosion-resistant, high-pressure resistant

Applicable equipment: Semiconductor process equipment such as Applied Materials CVD, PVD, Etch, Ion Implant, etc

Pressure range: Designed according to process requirements, supporting low-pressure to high-pressure pneumatic control

Application scenarios

Process gas flow and pressure control

Adjust the gas supply pressure and flow rate to ensure that the process module operates according to the set conditions.

Pneumatic valve and actuator drive

Provide a stable air source for valves, clamps, or other pneumatic devices to achieve precise movement.

Process stability guarantee

Ensure stable gas supply and improve the repeatability of deposition, etching, or ion implantation processes.

Equipment maintenance and module replacement

Modular design facilitates disassembly and replacement, reducing equipment downtime.

Product advantages

Accurate air pressure control: ensuring stable operation of the pneumatic system and improving process consistency.

High reliability: resistant to high voltage, corrosion, and suitable for semiconductor process environments.

Modular design: easy to install, maintain, and upgrade, improving equipment availability.

Strong compatibility: Supports compatibility with multiple AMAT pneumatic control systems and process modules.

High process safety: stabilize the pneumatic environment, reduce equipment failures and operational risks.

AMAT Applied Materials  0190-35252氣動室組件 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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