AMAT Applied Materials 0010-10371傳感器盒

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT 0010-10371 傳感器盒是 Applied Materials 半導(dǎo)體設(shè)備中的關(guān)鍵檢測(cè)模塊，用于集中安裝和管理各種工藝傳感器。該模塊能夠收集溫度、壓力、流量、濕度等多種工藝參數(shù)，通過(guò)集成接口將信號(hào)傳輸至控制器或數(shù)字控制系統(tǒng)，實(shí)現(xiàn)對(duì)半導(dǎo)體設(shè)備工藝環(huán)境的實(shí)時(shí)監(jiān)控和精確調(diào)節(jié)。傳感器盒是保障設(shè)備工藝穩(wěn)定性、提高良率的重要組成部分。

技術(shù)參數(shù)（典型特征）

• 類型：傳感器盒 / Sensor Box

• 功能：集中安裝傳感器、采集工藝參數(shù)、信號(hào)傳輸

• 支持傳感器類型：溫度傳感器、壓力傳感器、流量計(jì)、濕度傳感器等

• 接口形式：多通道電氣接口，支持模擬量和數(shù)字量信號(hào)傳輸

• 工作環(huán)境：潔凈室兼容，耐高溫、抗振動(dòng)

• 兼容設(shè)備：Applied Materials 各類沉積（CVD/PVD）、刻蝕（Etch）、離子注入、熱處理設(shè)備

• 信號(hào)處理：可與控制器或數(shù)字控制系統(tǒng)實(shí)現(xiàn)閉環(huán)控制

應(yīng)用場(chǎng)景

1. 工藝參數(shù)監(jiān)控

   • 實(shí)時(shí)采集腔體及工藝環(huán)境的溫度、壓力、流量等參數(shù)。

2. 數(shù)據(jù)傳輸與控制

   • 將傳感器信號(hào)傳輸至控制系統(tǒng)，用于自動(dòng)調(diào)節(jié)工藝參數(shù)。

3. 工藝優(yōu)化與追溯

   • 提供精確數(shù)據(jù)支持工藝優(yōu)化及產(chǎn)品質(zhì)量追溯。

4. 設(shè)備維護(hù)和模塊替換

   • 模塊化設(shè)計(jì)便于拆裝與更換，提高設(shè)備維護(hù)效率。

AMAT Applied Materials 0190-35252氣動(dòng)室組件 英文資料：

Product Overview

The AMAT 0010-10371 sensor box is a key detection module in Applied Materials semiconductor equipment, used for centralized installation and management of various process sensors. This module can collect various process parameters such as temperature, pressure, flow rate, humidity, etc., and transmit signals to the controller or digital control system through an integrated interface, achieving real-time monitoring and precise adjustment of the semiconductor equipment process environment. The sensor box is an important component in ensuring equipment process stability and improving yield.

Technical parameters (typical features)

Type: Sensor Box

Function: Centralized installation of sensors, collection of process parameters, signal transmission

Supporting sensor types: temperature sensor, pressure sensor, flow meter, humidity sensor, etc

Interface form: Multi channel electrical interface, supporting analog and digital signal transmission

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, heat treatment equipment

Signal processing: can achieve closed-loop control with controllers or digital control systems

Application scenarios

Process parameter monitoring

Real time collection of temperature, pressure, flow rate and other parameters of the chamber and process environment.

Data transmission and control

Transmit sensor signals to the control system for automatic adjustment of process parameters.

Process optimization and traceability

Provide precise data to support process optimization and product quality traceability.

Equipment maintenance and module replacement

Modular design facilitates disassembly and replacement, improving equipment maintenance efficiency.

AMAT Applied Materials  0190-35252氣動(dòng)室組件 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218