AMAT Applied Materials 0190-77587主框架接口模塊

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT 0190-77587 主框架接口模塊是 Applied Materials 半導(dǎo)體設(shè)備中的關(guān)鍵通信和接口模塊，用于連接設(shè)備主框架與各子系統(tǒng)或控制模塊。該模塊負(fù)責(zé)信號的匯總、傳遞與分配，實現(xiàn)主控制器與加熱器、流量控制器、真空系統(tǒng)、數(shù)字控制器等子模塊的協(xié)同工作，是保證設(shè)備整體穩(wěn)定運行和工藝精確控制的重要組件。

技術(shù)參數(shù)（典型特征）

• 類型：主框架接口模塊 / Mainframe Interface Module

• 功能：信號匯總、信號分配、數(shù)據(jù)通信

• 接口類型：多通道數(shù)字和模擬信號接口，兼容設(shè)備總線通信

• 工作環(huán)境：潔凈室兼容，耐高溫、抗振動

• 兼容設(shè)備：Applied Materials 各類沉積（CVD/PVD）、刻蝕（Etch）、離子注入、熱處理設(shè)備

• 電氣特性：支持主控制器與各子系統(tǒng)模塊的安全、可靠通信

應(yīng)用場景

1. 子系統(tǒng)通信橋接

   • 將主控制器與各功能模塊（加熱器、流量控制器、真空系統(tǒng)、分析模塊等）連接，實現(xiàn)信息傳遞。

2. 信號分配與整合

   • 匯總各子系統(tǒng)信號，確保主控制器能夠準(zhǔn)確掌握設(shè)備狀態(tài)。

3. 設(shè)備協(xié)調(diào)運行

   • 支持各模塊同步操作，保證工藝流程穩(wěn)定運行。

4. 維護與升級便捷

   • 模塊化接口設(shè)計，便于替換和升級子系統(tǒng)模塊，減少停機時間。

產(chǎn)品優(yōu)勢

• 高可靠性：確保主控制器與子系統(tǒng)模塊間通信穩(wěn)定可靠。

• 模塊化設(shè)計：便于安裝、拆卸和維護，提高設(shè)備可用性。

• 兼容性廣：適配多種 AMAT 半導(dǎo)體設(shè)備及控制系統(tǒng)。

• 支持實時監(jiān)控：及時傳遞各子系統(tǒng)信號，保證工藝穩(wěn)定性。

• 提升工藝一致性：通過協(xié)調(diào)子系統(tǒng)，實現(xiàn)工藝參數(shù)精確控制，減少波動。

AMAT Applied Materials 0100-90025操作控制面板 英文資料：

Product Overview

The AMAT 0190-77587 main framework interface module is a critical communication and interface module in Applied Materials semiconductor equipment, used to connect the equipment main framework with various subsystems or control modules. This module is responsible for summarizing, transmitting, and distributing signals, achieving collaborative work between the main controller and sub modules such as heaters, flow controllers, vacuum systems, and digital controllers. It is an important component to ensure the overall stable operation of the equipment and precise process control.

Technical parameters (typical features)

Type: Mainframe Interface Module

Function: Signal aggregation, signal distribution, data communication

Interface type: Multi channel digital and analog signal interface, compatible with device bus communication

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, heat treatment equipment

Electrical characteristics: Supports safe and reliable communication between the main controller and various subsystem modules

Application scenarios

Subsystem Communication Bridge

Connect the main controller to various functional modules (heater, flow controller, vacuum system, analysis module, etc.) to achieve information transmission.

Signal allocation and integration

Summarize the signals of each subsystem to ensure that the main controller can accurately grasp the equipment status.

Coordinated operation of equipment

Support synchronous operation of various modules to ensure stable operation of the process flow.

Easy maintenance and upgrade

Modular interface design facilitates the replacement and upgrade of subsystem modules, reducing downtime.

Product advantages

High reliability: Ensure stable and reliable communication between the main controller and subsystem modules.

Modular design: easy to install, disassemble, and maintain, improving equipment availability.

Wide compatibility: compatible with various AMAT semiconductor devices and control systems.

Support real-time monitoring: timely transmission of signals from various subsystems to ensure process stability.

Improving process consistency: By coordinating subsystems, precise control of process parameters can be achieved, reducing fluctuations.

AMAT Applied Materials  0100-90025操作控制面板 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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