AMAT  0100-00025電源模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT 0100-00025 電源模塊

產(chǎn)品概述

AMAT（Applied Materials）0100-00025 電源模塊是一種用于半導體制造設(shè)備的核心電氣供能單元，用于為設(shè)備內(nèi)部各子模塊提供穩(wěn)定、可靠的直流或交流電源。它通常集成在控制箱、底盤控制箱或獨立電源柜中，為加熱器、泵浦、氣動閥門、射頻模塊、控制器等關(guān)鍵模塊供電，確保設(shè)備穩(wěn)定運行、工藝精度和系統(tǒng)安全。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 輸入電源：工業(yè)標準 AC 電源

• 輸出類型：直流/交流電源輸出，多路可調(diào)

• 額定功率：適用于高功率工藝模塊

• 保護功能：過流保護、過壓保護、短路保護

• 接口：可與設(shè)備控制系統(tǒng)和安全互鎖系統(tǒng)連接，實現(xiàn)遠程監(jiān)控

• 安裝方式：模塊化，便于集成、維護和現(xiàn)場更換

• 環(huán)境適應(yīng)性：耐高溫、耐振動，適應(yīng)潔凈室工藝環(huán)境

應(yīng)用場景

1. 控制器與底盤控制箱供電

   • 為控制器、PCB、互鎖模塊等提供穩(wěn)定電源

   • 保證內(nèi)部電子模塊正常運行

2. 沉積工藝（CVD/PVD/ALD）

   • 為加熱器、泵浦、氣體閥門提供高精度電源

   • 支持薄膜沉積過程的溫度和流量控制

3. 刻蝕工藝設(shè)備

   • 為射頻模塊、壓力傳感器、流量控制模塊供電

   • 保證刻蝕功率和氣體控制穩(wěn)定

4. 離子注入系統(tǒng)

   • 提供離子源、掃描系統(tǒng)及束流監(jiān)測模塊的電力

   • 確保注入劑量和均勻性一致

5. 工廠自動化與安全系統(tǒng)

   • 與互鎖及監(jiān)控系統(tǒng)配合，實現(xiàn)設(shè)備異常斷電保護

   • 提高操作安全性和工藝連續(xù)性

AMAT  0100-00025電源模塊 英文資料：

AMAT 0100-00025 power module

Product Overview

AMAT (Applied Materials) 0100-00025 power module is a core electrical power supply unit used in semiconductor manufacturing equipment to provide stable and reliable DC or AC power to various sub modules inside the equipment. It is usually integrated into control boxes, chassis control boxes, or independent power cabinets to supply power to key modules such as heaters, pumps, pneumatic valves, RF modules, controllers, etc., ensuring stable equipment operation, process accuracy, and system safety.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input power supply: Industrial standard AC power supply

Output type: DC/AC power output, multiple adjustable channels

Rated power: suitable for high-power process modules

Protection functions: overcurrent protection, overvoltage protection, short circuit protection

Interface: Can connect with device control system and security interlock system to achieve remote monitoring

Installation method: Modular, easy to integrate, maintain, and ｒｅｐｌａｃｅ on site

Environmental adaptability: high temperature resistance, vibration resistance, suitable for clean room process environment

Application scenarios

Controller and chassis control box power supply

For the controller PCB、 Interlocking modules and other components provide stable power supply

Ensure the normal operation of internal electronic modules

Deposition process (CVD/PVD/ALD)

Provide high-precision power supply for heaters, pumps, and gas valves

Support temperature and flow control during thin film deposition process

Etching process equipment

Power supply for RF module, pressure sensor, and flow control module

Ensure stable etching power and gas control

Ion implantation system

Provide power for ion source, scanning system, and beam monitoring module

Ensure consistent injection dose and uniformity

Factory Automation and Safety Systems

Cooperate with interlocking and monitoring systems to achieve equipment abnormal power-off protection

Improve operational safety and process continuity

AMAT 0100-00025電源模塊  產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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