AMAT Applied Materials 0680-01169加熱器
1.產(chǎn) 品 資 料 介 紹:
- 產(chǎn)品型號:0680-01169,這是產(chǎn)品的專屬標(biāo)識,用于精準(zhǔn)識別、采購與設(shè)備適配驗證,確保用戶能準(zhǔn)確匹配所需部件。
- 產(chǎn)品類型:半導(dǎo)體設(shè)備專用加熱器,主要用于腔體或模塊加熱,區(qū)別于通用工業(yè)加熱器,其設(shè)計更貼合半導(dǎo)體高精度工藝需求,能滿足設(shè)備對溫度控制的嚴(yán)苛標(biāo)準(zhǔn)。
- 核心功能:涵蓋工藝溫度控制、腔體 / 模塊加熱以及溫度穩(wěn)定性維持,可為半導(dǎo)體工藝提供持續(xù)、穩(wěn)定的熱量輸出,將工藝溫度偏差嚴(yán)格控制在允許范圍內(nèi),保障工藝質(zhì)量。
- 適用系統(tǒng):適用于 Applied Materials 晶圓處理設(shè)備,例如 CVD(化學(xué)氣相沉積)設(shè)備、PVD(物理氣相沉積)設(shè)備的腔體以及蝕刻機等,限定了產(chǎn)品適配的 AMAT 設(shè)備系列,確保與設(shè)備溫控系統(tǒng)、腔體結(jié)構(gòu)的兼容性。
AMAT Applied Materials 0680-01169加熱器 英文資料:
1、 Product Overview
AMAT Applied Materials 0680-01169 heater is a high-precision temperature control component designed specifically for semiconductor manufacturing equipment. Its core applications include wafer processing, thin film deposition, etching, and other key process links, providing stable and uniform heating support for equipment chambers or process modules. In the semiconductor production process, precise control of process temperature directly affects the processing quality and yield of wafers. This heater, through an efficient heat conversion structure and precise temperature response design, can quickly reach the target temperature and maintain stability, effectively avoiding process deviations caused by temperature fluctuations. It is one of the core components to ensure the process stability of semiconductor equipment.
The heater adopts a modular design, adapted to the mainstream semiconductor equipment cavity structure of AMAT, and can seamlessly connect with the temperature control system of the equipment to achieve real-time temperature monitoring and dynamic adjustment. The shell and heating element are made of special materials that are resistant to high corrosion and high temperature, which can adapt to the complex process environment inside semiconductor equipment (such as inert gas atmosphere, slight chemical corrosion environment, etc.), ensuring long-term stable operation and reducing equipment maintenance frequency and production costs.
2、 Technical parameters
The AMAT Applied Materials 0680-01169 heater is designed based on the stringent requirements of semiconductor processes, with specific technical parameters as follows:
Product model: 0680-01169, this is the exclusive identification of the product, used for precise identification, procurement, and equipment adaptation verification to ensure that users can accurately match the required components.
Product type: Semiconductor equipment specific heater, mainly used for heating chambers or modules. Different from general industrial heaters, its design is more in line with the high-precision process requirements of semiconductors and can meet the strict temperature control standards of equipment.
Core functions: Covering process temperature control, chamber/module heating, and temperature stability maintenance, it can provide continuous and stable heat output for semiconductor processes, strictly control process temperature deviation within the allowable range, and ensure process quality.
Applicable system: Suitable for Applied Materials wafer processing equipment, such as CVD (chemical vapor deposition) equipment, PVD (physical vapor deposition) equipment chambers, and etching machines. The AMAT equipment series for product adaptation is limited to ensure compatibility with equipment temperature control systems and chamber structures.
AMAT Applied Materials 0680-01169加熱器 產(chǎn)品展示

產(chǎn)品視頻
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| AMAT 00100-94015 | 24230-13900-71 | PCD230A101 3BHE022291R0101 |
| AMAT 0100-71172 | 53401-13380-71 | 0201925 |
| AMAT 0100-01-252 | 53401-U1162-71 | CDL-MICLE-FWAM |
| AMAT 0100-76088 | 53401-U2230-71 | 60M500-05-00 |
| AMAT 0100-98072 | 00591-32004-81 | 3AY1715-6L |
| AMAT 0100-09307 | 00591-63085-81 | 8LS2020 C162 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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