AMAT Applied Materials MQDB011AAD03交流電伺服驅(qū)動(dòng)器

1.產(chǎn) 品 資 料 介 紹：

AMAT Applied Materials MQDB011AAD03交流電伺服驅(qū)動(dòng)器 英文資料：

High precision motion drive: supporting precise operation of semiconductor equipment

As the "power control core" of semiconductor equipment, MQDB011AAD03 servo driver takes millisecond level response and micrometer level positioning accuracy as its core, ensuring the precise execution of key actions such as wafer transfer and process chamber positioning, directly affecting chip manufacturing yield:

Multi dimensional precise control capability

Supports three core control modes: position, speed, and torque, adapting to different process scenario requirements:

Position control: Equipped with an absolute value encoder (resolution ≥ 17 bits), the positioning accuracy reaches ± 0.1 °, and the repeated positioning error is ≤± 3 μ m, which can meet the nanoscale positioning requirements of lithography equipment workbenches and wafer alignment platforms;

Speed control: The speed adjustment range is 0-3000rpm, with a speed fluctuation rate of ≤± 0.1%. When switching between high-speed operation (2000rpm) and low-speed fine-tuning (5rpm) of the wafer transfer robotic arm, there is no speed impact to avoid wafer shaking or falling;

Torque control: The torque output range is 0-10Nm, with a control accuracy of ± 1% F.S. It can accurately regulate the force of the robotic arm gripping the wafer (usually maintained at 0.5-2Nm), preventing damage to the wafer edge or slipping due to insufficient force.

High speed response and dynamic adjustment

Adopting a dual core architecture of digital signal processor (DSP) and FPGA, with a control cycle of ≤ 100 μ s and a dynamic response time of ≤ 5ms, it can quickly compensate for load fluctuations - for example, when the robotic arm grabs a wafer (load increases by 0.5kg), the driver completes torque adjustment within 10ms to ensure speed stability; Equipped with adaptive PID algorithm, it can automatically optimize control parameters according to load changes. In frequent start stop scenarios such as etching equipment chamber door switches, the start stop impact is ≤ 5m/s 2, extending the service life of mechanical components.

Multi feedback mode adaptation

Compatible with digital Hall, incremental, and absolute encoder signals, supports 1Vpp sine wave signal acquisition, feedback signal ｕｐｄａｔｅ frequency ≥ 10kHz, and can capture real-time data such as motor speed and position deviation; High speed interaction between feedback data and the upper computer is achieved through CANopen bus, with a data transmission delay of ≤ 1ms, providing precise synchronization basis for multi axis collaborative control.

AMAT Applied Materials MQDB011AAD03交流電伺服驅(qū)動(dòng)器 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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