AMAT Applied Materials 0090-01419射頻發(fā)電機
1.產(chǎn) 品 資 料 介 紹：
- 寬域功率覆蓋與精準(zhǔn)調(diào)節(jié)：支持射頻功率輸出范圍（推測為 100W-3000W），可根據(jù)不同工藝需求（如硅片蝕刻、金屬薄膜沉積）實現(xiàn) 0.1W 級精度調(diào)節(jié)，功率輸出誤差≤±0.5%，確保等離子體密度穩(wěn)定控制在 101?-1012 cm?3 范圍，避免因功率波動導(dǎo)致的晶圓刻蝕深度偏差或薄膜厚度不均，保障工藝良率。
- 多頻段兼容適配：覆蓋半導(dǎo)體工藝常用射頻頻段（如 13.56MHz、27.12MHz、40.68MHz），可通過軟件一鍵切換頻段，無需更換硬件模塊，適配不同工藝對射頻頻率的差異化需求 —— 例如 13.56MHz 頻段適用于大面積均勻蝕刻，40.68MHz 頻段適用于高精度細(xì)線條刻蝕，提升設(shè)備工藝兼容性。
- 低諧波失真與高功率因數(shù)：采用先進(jìn)的射頻振蕩與功率放大電路，諧波失真度≤-40dBc（相對于基波），避免高次諧波干擾等離子體生成過程，確保等離子體純度；同時功率因數(shù)≥0.95，有效降低電網(wǎng)能耗，減少能源浪費，符合半導(dǎo)體行業(yè)綠色生產(chǎn)標(biāo)準(zhǔn)，單臺設(shè)備年均能耗較傳統(tǒng)射頻發(fā)電機降低 15% 以上。
- 實時閉環(huán)功率控制：內(nèi)置高精度功率傳感器（采樣頻率≥10kHz），可實時采集負(fù)載端（如蝕刻腔室）的實際功率，通過 PID 閉環(huán)控制算法在 100μs 內(nèi)完成功率補償，當(dāng)負(fù)載阻抗因工藝變化（如等離子體濃度波動）發(fā)生偏移時，仍能保持輸出功率穩(wěn)定，功率波動幅度≤±0.3%，避免工藝中斷或晶圓報廢。
AMAT Applied Materials 0090-01419射頻發(fā)電機 英文資料：
1、 High precision power output: meets the stringent requirements of semiconductor processes
As the "energy core" of semiconductor equipment, the 0090-01419 RF generator provides reliable RF energy for key processes such as etching and deposition with stable and precise power supply as its core, ensuring plasma control accuracy
Wide range power coverage and precise adjustment: Supports RF power output range (estimated to be 100W-3000W), can achieve 0.1W level precision adjustment according to different process requirements (such as silicon wafer etching, metal film deposition), power output error ≤ ± 0.5%, ensuring stable control of plasma density within the range of 10 1? -10 12 cm ? 3, avoiding wafer etching depth deviation or uneven film thickness caused by power fluctuations, and ensuring process yield.
Multi band compatibility adaptation: Covering commonly used RF frequency bands in semiconductor processes (such as 13.56MHz, 27.12MHz, 40.68MHz), the frequency band can be switched with one click through software without the need to ｒｅｐｌａｃｅ hardware modules, adapting to the differentiated RF frequency requirements of different processes - for example, the 13.56MHz frequency band is suitable for large-area uniform etching, and the 40.68MHz frequency band is suitable for high-precision fine wire etching, improving equipment process compatibility.
Low harmonic distortion and high power factor: Advanced RF oscillation and power amplification circuits are used, with harmonic distortion ≤ -40dBc (relative to the fundamental wave), to avoid high-order harmonic interference in the plasma generation process and ensure plasma purity; At the same time, the power factor is ≥ 0.95, effectively reducing power grid energy consumption and energy waste, meeting the green production standards of the semiconductor industry. The average annual energy consumption of a single device is reduced by more than 15% compared to traditional RF generators.
2、 Intelligent regulation and closed-loop feedback: ensuring process stability
Relying on AMAT's exclusive RF control technology, this generator has powerful intelligent regulation and real-time feedback capabilities, providing dual guarantees for process stability:
Real time closed-loop power control: Equipped with a high-precision power sensor (sampling frequency ≥ 10kHz), it can collect the actual power of the load end (such as the etching chamber) in real time. The PID closed-loop control algorithm completes power compensation within 100 μ s. When the load impedance deviates due to process changes (such as plasma concentration fluctuations), it can still maintain stable output power with a power fluctuation amplitude of ≤± 0.3%, avoiding process interruptions or wafer scrap.
AMAT Applied Materials 0090-01419射頻發(fā)電機 產(chǎn)品展示
產(chǎn)品視頻
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| 6RA2116-6DV60-6DB0-ZA07 | 531X112PSAAMG1 | F31X134EPRBDG1 |
| -6GC11 | 193X803BEG03 | F31X134EPRBAG1 |
| 6ES5998-8MB22 | 531X116SHAAAG1 | 531X308PCSAEG3 |
| 6ES5998-8MA12 | 531X102CCHAEM1 | 740-689986-002 |
| 6ES5998-5SK11 | 26-147415-00 | 073-404369-00 |
| 6ES5998-4ET31 | 531X111PSHAWG2 | 710-652697-00 |
| 6ES5998-3ES52 | 531X111PSHASG1 | 92-005422-OX |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
