AMAT Applied Materials 0100-01652氣體面板
1.產(chǎn) 品 資 料 介 紹：
核心規(guī)格
功能特點(diǎn)
典型應(yīng)用
AMAT Applied Materials 0100-01652氣體面板 英文資料：
AMAT Applied Materials 0100-01652 gas panel is an HDPCVD 300 mm platform gas distribution component, model Rev. 001, used for precise control and distribution of process gases to the reaction chamber, ensuring flow rate, pressure stability, and process repeatability.
Core specifications
Project specification remarks
Application series HDPCVD 300 mm high-density plasma chemical vapor deposition
Version number Rev. 001 Hardware iteration mark
Functional gas distribution and flow control with multiple independent channels
Number of channels 8-12 (customizable) Typical configuration 10 channels
Input gas types such as N ?, O ?, H ?, Ar, NF ∝, SiH ?, etc. to support corrosive and reactive gases
Input pressure ≤ 200 PSI (1.4 MPa) Process pressure range
Flow control quality flow controller (MFC) accuracy ± 1% F.S
Interface type VCR, Swagelok, CF flange high vacuum/high-purity connection
Material: 316L stainless steel, Hastelloy, PTFE, corrosion-resistant, low adsorption
Installation of standard cabinet with dimensions of approximately 600 × 400 × 200 mm
Protection level IP20 dustproof and splash proof
Features
High precision control: Each independent MFC ensures stable flow and can achieve ppm level control.
Corrosion resistant design: suitable for highly corrosive gases such as fluorine and chlorine.
Modular structure: Channels can be expanded or replaced, making maintenance convenient.
Status monitoring: equipped with pressure, flow, temperature sensors and LED indicator lights, providing real-time feedback on operating status.
Safety protection: equipped with overvoltage, undervoltage, leakage detection and automatic cut-off functions, in compliance with SEMI S2 safety standards.
Typical Applications
High density plasma chemical vapor deposition (HDPCVD)
Deposition of Silicon Nitride, Silicon Oxide, and Polycrystalline Silicon Thin Films
Gas supply for etching and cleaning processes
Gas Distribution and Flow Control in 300mm Wafer Manufacturing
AMAT Applied Materials 0100-01652氣體面板 產(chǎn)品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
