AMAT Applied Materials 0010-09035節(jié)氣閥

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT 0010-09035 節(jié)氣閥是 Applied Materials 半導(dǎo)體設(shè)備中的關(guān)鍵流體控制元件，用于調(diào)節(jié)工藝氣體或真空系統(tǒng)中的流量和壓力。該閥門可根據(jù)控制器信號(hào)精確調(diào)節(jié)開度，實(shí)現(xiàn)流量的連續(xù)控制，從而優(yōu)化沉積（CVD/PVD）、刻蝕（Etch）或其他真空工藝的工藝條件，是保證工藝穩(wěn)定性和設(shè)備安全的重要組成部分。

技術(shù)參數(shù)（典型特征）

• 類型：節(jié)氣閥 / Throttle Valve

• 功能：調(diào)節(jié)氣體或真空流量與壓力，實(shí)現(xiàn)精確控制

• 控制方式：電氣或氣動(dòng)控制，可與控制器實(shí)現(xiàn)閉環(huán)調(diào)節(jié)

• 接口類型：標(biāo)準(zhǔn)法蘭或管路接口，適配工藝氣體或真空系統(tǒng)

• 工作環(huán)境：潔凈室兼容，耐腐蝕、耐高溫

• 適用介質(zhì)：工藝氣體（如N?、Ar、SiH?等）及真空系統(tǒng)氣體

• 兼容設(shè)備：Applied Materials 各類沉積、刻蝕及真空工藝設(shè)備

應(yīng)用場(chǎng)景

1. 工藝流量調(diào)節(jié)

   • 精確控制工藝氣體或真空系統(tǒng)流量，保證工藝穩(wěn)定性。

2. 真空控制

   • 調(diào)節(jié)腔體壓力，實(shí)現(xiàn)沉積或刻蝕工藝所需的真空環(huán)境。

3. 工藝自動(dòng)化

   • 與控制器聯(lián)動(dòng)，實(shí)現(xiàn)閉環(huán)調(diào)節(jié)，提高工藝重復(fù)性和一致性。

4. 設(shè)備安全保護(hù)

   • 防止流量異?；驂毫^高對(duì)設(shè)備和工藝造成影響。

AMAT Applied Materials  0100-35057氣體面板 英文資料：

Product Overview

AMAT 0010-09035 throttle valve is a key fluid control component in Applied Materials semiconductor equipment, used to regulate the flow and pressure of process gases or vacuum systems. This valve can accurately adjust its opening according to the controller signal, achieving continuous flow control and optimizing the process conditions of deposition (CVD/PVD), etching (Etch) or other vacuum processes. It is an important component to ensure process stability and equipment safety.

Technical parameters (typical features)

Type: Throttle Valve

Function: Adjust gas or vacuum flow and pressure to achieve precise control

Control mode: Electrical or pneumatic control, can achieve closed-loop regulation with the controller

Interface type: standard flange or pipeline interface, suitable for process gas or vacuum systems

Work environment: cleanroom compatible, corrosion-resistant, high temperature resistant

Applicable media: process gases (such as N ?, Ar, SiH ?, etc.) and vacuum system gases

Compatible devices: Various deposition, etching, and vacuum process equipment from Applied Materials

Application scenarios

Process flow regulation

Accurately control the flow rate of process gas or vacuum system to ensure process stability.

vacuum control

Adjust the chamber pressure to achieve the vacuum environment required for deposition or etching processes.

PROCESS AUTOMATION

Linkage with the controller to achieve closed-loop regulation and improve process repeatability and consistency.

Equipment safety protection

Prevent abnormal flow or high pressure from affecting equipment and processes.

AMAT Applied Materials  0100-35057氣體面板 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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