AMAT Applied Materials 0100-90855旋轉(zhuǎn)/掃描聯(lián)鎖板

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT 0100-90855 旋轉(zhuǎn)/掃描聯(lián)鎖板是 Applied Materials 半導(dǎo)體設(shè)備中的安全和控制模塊，用于管理設(shè)備中旋轉(zhuǎn)部件或掃描系統(tǒng)的動(dòng)作聯(lián)鎖。該模塊通過(guò)監(jiān)控旋轉(zhuǎn)或掃描裝置的狀態(tài)，確保在設(shè)備操作或工藝運(yùn)行過(guò)程中實(shí)現(xiàn)安全互鎖，防止設(shè)備損壞或工藝異常。它是半導(dǎo)體設(shè)備自動(dòng)化運(yùn)行和操作安全的重要組成部分。

技術(shù)參數(shù)（典型特征）

• 類型：旋轉(zhuǎn)/掃描聯(lián)鎖板 / Rotation/Scan Interlock Board

• 功能：監(jiān)控旋轉(zhuǎn)或掃描系統(tǒng)狀態(tài)，提供安全聯(lián)鎖信號(hào)

• 輸入信號(hào)：旋轉(zhuǎn)或掃描裝置位置、速度或狀態(tài)反饋

• 輸出信號(hào)：聯(lián)鎖控制信號(hào)，傳遞至控制器或安全系統(tǒng)

• 接口類型：數(shù)字輸入/輸出接口，與主控制器或操作面板連接

• 工作環(huán)境：潔凈室兼容，耐高溫、抗振動(dòng)

• 兼容設(shè)備：Applied Materials 各類沉積（CVD/PVD）、刻蝕（Etch）、離子注入及掃描相關(guān)工藝設(shè)備

應(yīng)用場(chǎng)景

1. 旋轉(zhuǎn)部件聯(lián)鎖

   • 監(jiān)控晶圓或工藝板旋轉(zhuǎn)裝置，確保旋轉(zhuǎn)安全運(yùn)行，防止異常動(dòng)作。

2. 掃描系統(tǒng)安全控制

   • 對(duì)掃描機(jī)構(gòu)的狀態(tài)進(jìn)行監(jiān)控，實(shí)現(xiàn)操作安全互鎖。

3. 工藝保護(hù)

   • 在旋轉(zhuǎn)或掃描設(shè)備異常時(shí)自動(dòng)觸發(fā)聯(lián)鎖信號(hào)，防止工藝或設(shè)備損壞。

4. 設(shè)備維護(hù)與替換

   • 模塊化設(shè)計(jì)便于拆裝和更換，減少停機(jī)時(shí)間。

AMAT Applied Materials  0100-90855旋轉(zhuǎn)/掃描聯(lián)鎖板 英文資料：

Product Overview

AMAT 0100-90855 Rotation/Scanning Interlock Board is a safety and control module in Applied Materials semiconductor equipment, used to manage the action interlocking of rotating components or scanning systems in the equipment. This module ensures safe interlocking during equipment operation or process running by monitoring the status of rotating or scanning devices, preventing equipment damage or process abnormalities. It is an important component of the automated operation and operational safety of semiconductor equipment.

Technical parameters (typical features)

Type: Rotation/Scan Interlock Board

Function: Monitor the rotation or scanning system status and provide safety interlock signals

Input signal: feedback on the position, speed, or status of the rotating or scanning device

Output signal: Interlocking control signal, transmitted to the controller or safety system

Interface type: Digital input/output interface, connected to the main controller or operation panel

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, and scanning related process equipment

Application scenarios

Interlocking of rotating components

Monitor the wafer or process board rotation device to ensure safe operation and prevent abnormal movements.

Scanning system security control

Monitor the status of the scanning mechanism and achieve operational safety interlock.

Process protection

Automatically trigger interlocking signals when rotating or scanning equipment is abnormal to prevent process or equipment damage.

Equipment maintenance and replacement

Modular design facilitates disassembly and replacement, reducing downtime.

AMAT Applied Materials  0100-90855旋轉(zhuǎn)/掃描聯(lián)鎖板 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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