AMAT Applied Materials 0100-35057氣體面板

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT 0100-35057 氣體面板是 Applied Materials 半導(dǎo)體設(shè)備中用于氣體管理的核心模塊。它負(fù)責(zé)將工藝氣體從氣源分配到設(shè)備各工藝模塊，并調(diào)節(jié)氣體流量、壓力和混合比例，確保沉積（CVD/PVD）、刻蝕（Etch）及其他工藝過程中氣體供應(yīng)的穩(wěn)定和精確。氣體面板是半導(dǎo)體工藝安全、穩(wěn)定運行和重復(fù)性控制的重要組成部分。

技術(shù)參數(shù)（典型特征）

• 類型：氣體面板 / Gas Panel

• 功能：氣體分配、流量調(diào)節(jié)、壓力控制、混氣管理

• 接口類型：多通道氣體輸入/輸出接口，適配各類工藝模塊

• 控制方式：可配合流量控制器或控制器實現(xiàn)數(shù)字或模擬閉環(huán)控制

• 工作環(huán)境：潔凈室兼容，耐腐蝕、耐高壓

• 適用氣體：工藝氣體（如N?、Ar、H?、SiH?等）

• 兼容設(shè)備：Applied Materials 各類沉積、刻蝕及熱處理設(shè)備

應(yīng)用場景

1. 工藝氣體分配與控制

   • 將氣源供應(yīng)的氣體分配至沉積、刻蝕或其他工藝模塊，調(diào)節(jié)流量與壓力。

2. 氣體混合管理

   • 對多種氣體進(jìn)行精確混合，確保工藝反應(yīng)條件一致。

3. 工藝安全與保護(hù)

   • 內(nèi)置安全閥或聯(lián)鎖機制，防止氣體異?；蛐孤?。

4. 設(shè)備維護(hù)與模塊替換

   • 模塊化設(shè)計便于拆裝和更換，提高維護(hù)效率。

AMAT Applied Materials  0100-35057氣體面板 英文資料：

Product Overview

AMAT 0100-35057 gas panel is a core module used for gas management in Applied Materials semiconductor equipment. It is responsible for distributing process gases from the gas source to various process modules of the equipment, and adjusting gas flow rate, pressure, and mixing ratio to ensure stable and accurate gas supply during deposition (CVD/PVD), etching (Etch), and other processes. Gas panel is an important component of semiconductor process safety, stable operation, and repeatability control.

Technical parameters (typical features)

Type: Gas Panel

Function: Gas distribution, flow regulation, pressure control, mixing management

Interface type: Multi channel gas input/output interface, compatible with various process modules

Control method: It can be combined with a flow controller or controller to achieve digital or analog closed-loop control

Work environment: cleanroom compatible, corrosion-resistant, high-pressure resistant

Applicable gases: process gases (such as N ?, Ar, H ?, SiH ?, etc.)

Compatible devices: Various deposition, etching, and heat treatment equipment from Applied Materials

Application scenarios

Process gas distribution and control

Distribute the gas supplied by the gas source to deposition, etching, or other process modules, and adjust the flow rate and pressure.

Gas mixing management

Accurately mix multiple gases to ensure consistent process reaction conditions.

Process safety and protection

Built in safety valve or interlocking mechanism to prevent gas abnormalities or leaks.

Equipment maintenance and module replacement

Modular design facilitates disassembly and replacement, improving maintenance efficiency.

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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