AMAT Applied Materials E19321290交流電源模塊
1.產(chǎn) 品 資 料 介 紹:
產(chǎn)品概述
AMAT E19321290 交流電源模塊是 Applied Materials 半導(dǎo)體設(shè)備中的核心電力模塊,用于為設(shè)備各子系統(tǒng)和控制模塊提供穩(wěn)定可靠的交流電源。該模塊能夠?qū)⑼獠侩娋W(wǎng)電壓轉(zhuǎn)換為設(shè)備所需的標(biāo)準(zhǔn)電壓和頻率,確保加熱器、驅(qū)動(dòng)器、控制器、傳感器及其他工藝模塊的正常運(yùn)行,是設(shè)備安全、穩(wěn)定、高效運(yùn)行的基礎(chǔ)保障。
技術(shù)參數(shù)(典型特征)
類型:交流電源模塊 / AC Power Module
功能:提供穩(wěn)定交流電源,支持設(shè)備子系統(tǒng)運(yùn)行
輸入電壓:標(biāo)準(zhǔn)工業(yè)電網(wǎng)電壓(具體取決設(shè)備型號(hào))
輸出電壓/功率:根據(jù)設(shè)備需求設(shè)計(jì),支持各類模塊供電
保護(hù)功能:過壓保護(hù)、過流保護(hù)、短路保護(hù)
接口類型:電氣接口,與設(shè)備控制系統(tǒng)及負(fù)載模塊連接
工作環(huán)境:潔凈室兼容,耐高溫、抗振動(dòng)
兼容設(shè)備:Applied Materials 各類沉積(CVD/PVD)、刻蝕(Etch)、離子注入及熱處理設(shè)備
應(yīng)用場(chǎng)景
核心電力供應(yīng)
為設(shè)備的控制系統(tǒng)、執(zhí)行器、傳感器及工藝模塊提供穩(wěn)定電源。
電源保護(hù)
防止電壓波動(dòng)、過流和短路對(duì)設(shè)備的損害,確保安全運(yùn)行。
工藝穩(wěn)定性保障
穩(wěn)定電源輸出,保證加熱器、驅(qū)動(dòng)器及控制模塊的正常運(yùn)行,提高工藝重復(fù)性。
設(shè)備維護(hù)與升級(jí)
模塊化設(shè)計(jì)便于安裝、替換和維護(hù),提高設(shè)備可用性。
AMAT Applied Materials E19321290交流電源模塊 英文資料:
Product Overview
The AMAT E19321290 AC power module is the core power module in Applied Materials semiconductor equipment, used to provide stable and reliable AC power to various subsystems and control modules of the equipment. This module is capable of converting external grid voltage into the standard voltage and frequency required by the equipment, ensuring the normal operation of heaters, drivers, controllers, sensors, and other process modules. It is the fundamental guarantee for the safe, stable, and efficient operation of the equipment.
Technical parameters (typical features)
Type: AC Power Module
Function: Provide stable AC power supply and support the operation of device subsystems
Input voltage: Standard industrial grid voltage (depending on equipment model)
Output voltage/power: Designed according to equipment requirements, supporting power supply for various modules
Protection functions: overvoltage protection, overcurrent protection, short circuit protection
Interface type: Electrical interface, connected to equipment control system and load module
Work environment: cleanroom compatible, high temperature resistant, vibration resistant
Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, and heat treatment equipment
Application scenarios
Core power supply
Provide stable power supply for the control system, actuators, sensors, and process modules of the equipment.
power protection
Prevent damage to equipment caused by voltage fluctuations, overcurrent, and short circuits to ensure safe operation.
Process stability guarantee
Stable power output ensures the normal operation of heaters, drivers, and control modules, and improves process repeatability.
Equipment maintenance and upgrade
Modular design facilitates installation, replacement, and maintenance, improving equipment availability.
AMAT Applied Materials E19321290交流電源模塊 產(chǎn)品展示

產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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