AMAT Applied Materials  0120-93660導(dǎo)管PCB卡

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT 0120-93660 導(dǎo)管 PCB 卡是 Applied Materials 半導(dǎo)體離子注入設(shè)備中的關(guān)鍵電子模塊。該卡板安裝在離子注入系統(tǒng)的導(dǎo)管（Guiding Tube）部分，用于控制、監(jiān)測和信號處理。它在離子束傳輸與對準(zhǔn)過程中起到重要作用，確保束流路徑穩(wěn)定、均勻，并維持工藝的高精度和一致性。

技術(shù)參數(shù)（推斷與行業(yè)常規(guī)）

• 功能類型：導(dǎo)管控制與監(jiān)測電路板

• 適用設(shè)備：Quantum X 單晶圓高電流離子注入系統(tǒng)及相關(guān)機(jī)型

• 電源供給：常見為低壓直流（如 24V DC 或 ±15V DC）

• 信號接口：模擬與數(shù)字混合信號接口，支持傳感器輸入和控制輸出

• 監(jiān)控內(nèi)容：電壓、電流、溫度、導(dǎo)管位置或束流相關(guān)參數(shù)

• 工作環(huán)境：潔凈室、真空或低壓環(huán)境下穩(wěn)定運行

• 可靠性設(shè)計：抗電磁干擾、耐離子束環(huán)境、支持長期連續(xù)運行

應(yīng)用場景

1. 離子束引導(dǎo)控制

   • 協(xié)助導(dǎo)管對離子束進(jìn)行偏轉(zhuǎn)、聚焦和路徑調(diào)節(jié)，保證束流均勻注入晶圓。

2. 工藝監(jiān)測與反饋

   • 采集導(dǎo)管中傳感器信號，監(jiān)控電氣狀態(tài)與運行參數(shù)，并實時反饋給上位機(jī)控制系統(tǒng)。

3. 安全與保護(hù)

   • 檢測異常情況（如過熱、電壓波動、信號失真），觸發(fā)保護(hù)邏輯，確保設(shè)備與晶圓安全。

4. 精度與穩(wěn)定性提升

   • 通過精細(xì)化控制離子束傳輸路徑，提高摻雜工藝的一致性與生產(chǎn)良率。

產(chǎn)品優(yōu)勢

• 高匹配性：為 AMAT Quantum X 設(shè)備專門設(shè)計，易于更換與集成。

• 高精度控制：保證離子束導(dǎo)向精度，提升半導(dǎo)體加工質(zhì)量。

• 可靠穩(wěn)定：能在真空和高電磁干擾環(huán)境中長期穩(wěn)定工作。

• 模塊化設(shè)計：支持快速維護(hù)和更換，減少設(shè)備停機(jī)時間。

• 監(jiān)控與保護(hù)功能：集成狀態(tài)監(jiān)測與故障防護(hù)，增強(qiáng)系統(tǒng)安全性。

AMAT Applied Materials 0120-93660導(dǎo)管PCB卡 英文資料：

Product Overview

AMAT 0120-93660 catheter PCB card is a key electronic module in Applied Materials semiconductor ion implantation equipment. This card board is installed in the Guiding Tube section of the ion implantation system for control, monitoring, and signal processing. It plays an important role in ion beam transmission and alignment, ensuring stable and uniform beam paths, and maintaining high precision and consistency of the process.

Technical parameters (inference and industry norms)

Function type: Catheter control and monitoring circuit board

Applicable equipment: Quantum X single crystal circular high current ion implantation system and related models

Power supply: commonly low voltage direct current (such as 24V DC or ± 15V DC)

Signal interface: analog and digital mixed signal interface, supporting sensor input and control output

Monitoring content: voltage, current, temperature, conduit position or beam related parameters

Working environment: Stable operation in clean room, vacuum or low-pressure environment

Reliability design: resistant to electromagnetic interference, ion beam environment, and supports long-term continuous operation

Application scenarios

Ion beam guidance control

Assist the catheter in deflection, focusing, and path adjustment of the ion beam to ensure uniform beam injection into the wafer.

Process monitoring and feedback

Collect sensor signals from the catheter, monitor electrical status and operating parameters, and provide real-time feedback to the upper computer control system.

Security and protection

Detect abnormal situations (such as overheating, voltage fluctuations, signal distortion), trigger protection logic, and ensure the safety of equipment and wafers.

Improved accuracy and stability

By finely controlling the ion beam transmission path, the consistency and production yield of doping processes can be improved.

Product advantages

High compatibility: Specially designed for AMAT Quantum X equipment, easy to ｒｅｐｌａｃｅ and integrate.

High precision control: ensuring the accuracy of ion beam guidance and improving the quality of semiconductor processing.

Reliable and stable: capable of long-term stable operation in vacuum and high electromagnetic interference environments.

Modular design: supports rapid maintenance and replacement, reducing equipment downtime.

Monitoring and protection functions: Integrate status monitoring and fault protection to enhance system security.

AMAT Applied Materials 0120-93660導(dǎo)管PCB卡 產(chǎn)品展示      

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