AMAT Applied Materials E-710K126X數(shù)字控制器 

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT E-710K126X 數(shù)字控制器是 Applied Materials 半導(dǎo)體設(shè)備中的核心控制模塊，用于管理和調(diào)節(jié)設(shè)備各子系統(tǒng)的運(yùn)行狀態(tài)。該控制器通過(guò)數(shù)字化信號(hào)處理，實(shí)現(xiàn)精確的工藝控制、設(shè)備協(xié)調(diào)和狀態(tài)監(jiān)控，是確保半導(dǎo)體工藝精度、穩(wěn)定性和安全性的關(guān)鍵組件。

技術(shù)參數(shù)（推斷與行業(yè)常規(guī)）

• 類型：數(shù)字控制器（Digital Controller）

• 控制方式：基于數(shù)字信號(hào)處理（DSP）的閉環(huán)控制

• 接口類型：多通道輸入輸出接口，支持模擬信號(hào)、數(shù)字信號(hào)及通訊總線

• 適用模塊：加熱器、射頻匹配組件、傳感器、執(zhí)行機(jī)構(gòu)等

• 數(shù)據(jù)處理能力：高速實(shí)時(shí)處理信號(hào)與反饋，實(shí)現(xiàn)工藝參數(shù)精確控制

• 可靠性設(shè)計(jì)：抗電磁干擾、高溫、振動(dòng)環(huán)境，適合潔凈室運(yùn)行

• 兼容設(shè)備：Applied Materials 各類沉積（CVD/PVD）、刻蝕（Etch）、離子注入及熱處理設(shè)備

應(yīng)用場(chǎng)景

1. 工藝精密控制

   • 控制加熱器、射頻模塊、氣體流量、閥門(mén)等，實(shí)現(xiàn)高精度工藝條件。

2. 子系統(tǒng)協(xié)調(diào)

   • 協(xié)調(diào)設(shè)備內(nèi)部各模塊運(yùn)行，保證生產(chǎn)線同步性和效率。

3. 狀態(tài)監(jiān)控與報(bào)警

   • 實(shí)時(shí)采集各子系統(tǒng)參數(shù)，異常時(shí)觸發(fā)報(bào)警或保護(hù)邏輯，保障設(shè)備安全。

4. 數(shù)據(jù)記錄與追溯

   • 對(duì)工藝過(guò)程數(shù)據(jù)進(jìn)行采集與存儲(chǔ)，為生產(chǎn)質(zhì)量追溯和優(yōu)化提供依據(jù)。

AMAT Applied Materials E-710K126X數(shù)字控制器  英文資料：

Product Overview

The AMAT E-710K126X digital controller is the core control module in Applied Materials semiconductor equipment, used to manage and regulate the operating status of various subsystems of the equipment. This controller achieves precise process control, equipment coordination, and status monitoring through digital signal processing, and is a key component to ensure the accuracy, stability, and safety of semiconductor processes.

Technical parameters (inference and industry norms)

Type: Digital Controller

Control method: Closed loop control based on digital signal processing (DSP)

Interface type: Multi channel input/output interface, supporting analog signals, digital signals, and communication bus

Applicable modules: heaters, RF matching components, sensors, actuators, etc

Data processing capability: high-speed real-time processing of signals and feedback, achieving precise control of process parameters

Reliability design: resistant to electromagnetic interference, high temperature, vibration environment, suitable for clean room operation

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, and heat treatment equipment

Application scenarios

Process precision control

Control heaters, RF modules, gas flow rates, valves, etc. to achieve high-precision process conditions.

Subsystem coordination

Coordinate the operation of various modules within the equipment to ensure the synchronization and efficiency of the production line.

Status monitoring and alarm

Real time collection of subsystem parameters, triggering alarms or protection logic in case of abnormalities to ensure equipment safety.

Data recording and tracing

Collect and store process data to provide a basis for production quality traceability and optimization.

AMAT Applied Materials E-710K126X數(shù)字控制器  產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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