AMAT 0195-10582底盤控制箱

1.產(chǎn) 品 資 料 介 紹：

AMAT 0195-10582 底盤控制箱

產(chǎn)品概述

AMAT（Applied Materials）0195-10582 底盤控制箱是一款用于半導(dǎo)體制造設(shè)備的電氣與電子集成單元，通常安裝在設(shè)備底盤位置。它承擔(dān)電源分配、控制信號(hào)管理、互鎖保護(hù)等核心功能，為設(shè)備內(nèi)部的子模塊（如氣體閥門、加熱器、探測(cè)器、控制器等）提供穩(wěn)定的運(yùn)行環(huán)境和集中管理能力。底盤控制箱是確保設(shè)備長(zhǎng)期可靠運(yùn)行的重要基礎(chǔ)設(shè)施。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 系統(tǒng)類型：底盤集成電源與控制模塊

• 電源輸入：工業(yè)標(biāo)準(zhǔn) AC 電源，多路輸出

• 接口：數(shù)字/模擬 I/O 接口，兼容 AMAT 內(nèi)部模塊和上位機(jī)系統(tǒng)

• 安全功能：過(guò)壓、過(guò)流、短路保護(hù)及互鎖邏輯

• 適用環(huán)境：高潔凈度、半導(dǎo)體工藝設(shè)備底盤安裝

• 模塊化設(shè)計(jì)：支持現(xiàn)場(chǎng)維護(hù)與升級(jí)擴(kuò)展

應(yīng)用場(chǎng)景

1. 沉積工藝（CVD/PVD/ALD）

   • 為腔體加熱器、氣體閥門、泵浦及探測(cè)器板提供穩(wěn)定電源和控制信號(hào)

   • 協(xié)調(diào)子模塊運(yùn)行，保障薄膜沉積均勻性和工藝穩(wěn)定性

2. 刻蝕工藝設(shè)備

   • 控制射頻功率模塊、氣體流量、壓力傳感器等設(shè)備子模塊

   • 實(shí)現(xiàn)刻蝕精度控制和工藝一致性

3. 離子注入系統(tǒng)

   • 提供離子源、掃描系統(tǒng)和束流監(jiān)測(cè)模塊的電源與信號(hào)接口

   • 保證注入劑量和均勻性

4. 氣體與真空系統(tǒng)控制

   • 集中管理閥門、流量計(jì)、真空泵和壓力傳感器

   • 確保腔體環(huán)境穩(wěn)定

5. 工廠自動(dòng)化與安全互鎖

   • 與上位監(jiān)控系統(tǒng)接口，實(shí)現(xiàn)互鎖、報(bào)警和安全保護(hù)功能

   • 避免設(shè)備異常運(yùn)行造成損失

6. 研發(fā)與實(shí)驗(yàn)室工藝驗(yàn)證

   • 提供模塊化電氣控制平臺(tái)，支持新工藝開發(fā)和實(shí)驗(yàn)調(diào)試

AMAT 0195-10582底盤控制箱  英文資料：

AMAT 0195-10582 Chassis Control Box

Product Overview

AMAT (Applied Materials) 0195-10582 Chassis Control Box is an electrical and electronic integrated unit used in semiconductor manufacturing equipment, typically installed in the equipment chassis position. It undertakes core functions such as power distribution, control signal management, and interlock protection, providing a stable operating environment and centralized management capability for sub modules inside the equipment (such as gas valves, heaters, detectors, controllers, etc.). The chassis control box is an important infrastructure to ensure the long-term reliable operation of equipment.

Technical parameters (typical direction, specific data should refer to the original factory information)

System type: Chassis integrated power and control module

Power input: Industrial standard AC power supply, multiple outputs

Interface: Digital/Analog I/O interface, compatible with AMAT internal modules and upper computer system

Safety functions: overvoltage, overcurrent, short-circuit protection and interlock logic

Applicable environment: high cleanliness, semiconductor process equipment chassis installation

Modular design: supports on-site maintenance and upgrade expansion

Application scenarios

Deposition process (CVD/PVD/ALD)

Provide stable power supply and control signals for chamber heaters, gas valves, pumps, and detector boards

Coordinate the operation of submodules to ensure the uniformity of thin film deposition and process stability

Etching process equipment

Control sub modules such as RF power module, gas flow, pressure sensor, etc

Realize etching accuracy control and process consistency

Ion implantation system

Provide power and signal interfaces for ion sources, scanning systems, and beam monitoring modules

Ensure injection dose and uniformity

Gas and vacuum system control

Centralized management of valves, flow meters, vacuum pumps, and pressure sensors

Ensure stable chamber environment

Factory automation and safety interlock

Interface with the upper monitoring system to achieve interlocking, alarm, and security protection functions

To avoid losses caused by abnormal operation of equipment

R&D and laboratory process validation

Provide a modular electrical control platform to support new process development and experimental debugging

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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