AMAT 0010-38838交流配電器

1.產(chǎn) 品 資 料 介 紹：

AMAT 0010-38838 交流配電器

產(chǎn)品概述

AMAT（Applied Materials）0010-38838 交流配電器是一種用于半導(dǎo)體制造設(shè)備的電力分配與管理模塊。它主要負(fù)責(zé)將工業(yè)交流電源合理分配至設(shè)備內(nèi)部各子模塊，如控制器、加熱器、泵浦、氣動閥門和射頻模塊，確保各模塊獲得穩(wěn)定、可靠的電源供應(yīng)。交流配電器通常集成過載保護(hù)、短路保護(hù)及安全互鎖接口，是設(shè)備電氣系統(tǒng)的核心基礎(chǔ)設(shè)施之一。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 輸入電源：工業(yè)標(biāo)準(zhǔn) AC 電源

• 輸出通道：多路交流電輸出，適配各子模塊需求

• 保護(hù)功能：過載保護(hù)、短路保護(hù)、過壓保護(hù)

• 接口：與控制系統(tǒng)和互鎖系統(tǒng)連接，實(shí)現(xiàn)遠(yuǎn)程監(jiān)控與控制

• 安裝方式：模塊化安裝，便于集成于控制箱或底盤

• 環(huán)境適應(yīng)性：適應(yīng)半導(dǎo)體設(shè)備潔凈室和高功率工藝環(huán)境

應(yīng)用場景

1. 沉積工藝（CVD/PVD/ALD）

   • 為加熱器、泵浦、氣體閥門、控制器等模塊提供穩(wěn)定電源

   • 保證沉積過程的工藝穩(wěn)定性和設(shè)備安全

2. 刻蝕工藝設(shè)備

   • 分配電源給射頻功率模塊、傳感器和氣動組件

   • 支持刻蝕過程的精確控制和工藝重復(fù)性

3. 離子注入系統(tǒng)

   • 為離子源、掃描系統(tǒng)及束流監(jiān)測模塊供電

   • 確保注入劑量和能量的穩(wěn)定性

4. 控制箱與底盤控制箱

   • 作為內(nèi)部電源分配核心，提高設(shè)備電氣系統(tǒng)可靠性

   • 集成互鎖接口，實(shí)現(xiàn)過載、短路和安全保護(hù)

5. 工廠自動化與安全管理

   • 通過與上位系統(tǒng)連接，支持遠(yuǎn)程監(jiān)控、報(bào)警及自動停機(jī)

   • 保障設(shè)備運(yùn)行安全與工藝連續(xù)性

AMAT  0010-38838交流配電器 英文資料：

AMAT 0010-38838 AC Distributor

Product Overview

AMAT (Applied Materials) 0010-38838 AC distributor is a power distribution and management module used in semiconductor manufacturing equipment. It is mainly responsible for distributing industrial AC power to various sub modules within the equipment, such as controllers, heaters, pumps, pneumatic valves, and RF modules, to ensure stable and reliable power supply for each module. Communication power distribution equipment usually integrates overload protection, short circuit protection, and safety interlock interfaces, and is one of the core infrastructure of equipment electrical systems.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input power supply: Industrial standard AC power supply

Output channel: Multiple AC power outputs, adapted to the requirements of each submodule

Protection functions: overload protection, short circuit protection, overvoltage protection

Interface: Connect with the control system and interlock system to achieve remote monitoring and control

Installation method: Modular installation, easy to integrate into the control box or chassis

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and high-power process environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Provide stable power supply for modules such as heaters, pumps, gas valves, controllers, etc

Ensure the process stability and equipment safety during sedimentation

Etching process equipment

Allocate power to RF power modules, sensors, and pneumatic components

Support precise control and process repeatability of etching process

Ion implantation system

Power supply for ion source, scanning system, and beam monitoring module

Ensure the stability of injected dose and energy

Control box and chassis control box

As the core of internal power distribution, improving the reliability of equipment electrical systems

Integrate interlocking interfaces to achieve overload, short circuit, and safety protection

Factory Automation and Safety Management

By connecting with the upper system, it supports remote monitoring, alarm and automatic shutdown

Ensure equipment operation safety and process continuity

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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