AMAT 0190-18266氣動(dòng)鎖緊組件

1.產(chǎn) 品 資 料 介 紹：

AMAT 0190-18266 氣動(dòng)鎖緊組件

產(chǎn)品概述

AMAT（Applied Materials）0190-18266 氣動(dòng)鎖緊組件是一種用于半導(dǎo)體制造設(shè)備的機(jī)械定位與固定模塊，通過氣動(dòng)驅(qū)動(dòng)實(shí)現(xiàn)設(shè)備部件的快速鎖緊或釋放。它通常用于固定反應(yīng)腔體、工藝模塊或可移動(dòng)托盤，保證工藝過程中部件的穩(wěn)定性和精確定位，同時(shí)支持快速拆裝和維護(hù)。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 驅(qū)動(dòng)方式：氣動(dòng)執(zhí)行機(jī)構(gòu)

• 鎖緊力：滿足設(shè)備部件固定所需的機(jī)械力

• 行程：根據(jù)模塊設(shè)計(jì)，可實(shí)現(xiàn)完全鎖緊和釋放

• 接口：氣動(dòng)管路接口，兼容設(shè)備控制系統(tǒng)

• 安裝方式：模塊化，便于集成到設(shè)備底盤或腔體模塊

• 環(huán)境適應(yīng)性：適應(yīng)半導(dǎo)體潔凈室及高溫、真空工藝環(huán)境

應(yīng)用場(chǎng)景

1. 沉積工藝（CVD/PVD/ALD）

   • 鎖緊腔體或工藝模塊，保證薄膜沉積過程中工藝位置精度

   • 支持快速拆裝以便設(shè)備維護(hù)或更換模塊

2. 刻蝕工藝設(shè)備

   • 固定刻蝕腔體或工藝組件，確?？涛g均勻性和工藝重復(fù)性

3. 離子注入系統(tǒng)

   • 鎖緊掃描系統(tǒng)或束流模塊，保持精確對(duì)準(zhǔn)和穩(wěn)定性

4. 設(shè)備維護(hù)與操作

   • 提供安全鎖定功能，防止移動(dòng)部件意外滑動(dòng)或松動(dòng)

   • 支持快速釋放，便于現(xiàn)場(chǎng)維護(hù)和模塊更換

5. 自動(dòng)化工藝平臺(tái)

   • 與氣動(dòng)控制系統(tǒng)結(jié)合，實(shí)現(xiàn)遠(yuǎn)程自動(dòng)鎖緊和釋放，提高操作效率

AMAT  0190-18266氣動(dòng)鎖緊組件 英文資料：

AMAT 0190-18266 Pneumatic Locking Component

Product Overview

AMAT (Applied Materials) 0190-1826 Pneumatic Locking Assembly is a mechanical positioning and fixing module used in semiconductor manufacturing equipment, which achieves rapid locking or releasing of equipment components through pneumatic drive. It is usually used to fix reaction chambers, process modules, or movable trays, ensuring the stability and precise positioning of components during the process, while supporting quick disassembly and maintenance.

Technical parameters (typical direction, specific data should refer to the original factory information)

Drive mode: Pneumatic actuator

Locking force: the mechanical force required to fix the equipment components

Journey: According to the module design, it can achieve complete locking and releasing

Interface: Pneumatic pipeline interface, compatible with equipment control system

Installation method: Modular, easy to integrate into equipment chassis or cavity modules

Environmental adaptability: Suitable for semiconductor cleanrooms and high-temperature, vacuum process environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Lock the cavity or process module to ensure the accuracy of the process position during the thin film deposition process

Support quick disassembly and assembly for equipment maintenance or module replacement

Etching process equipment

Fixed etching chamber or process components to ensure etching uniformity and process repeatability

Ion implantation system

Lock the scanning system or beam module to maintain precise alignment and stability

Equipment maintenance and operation

Provide safety locking function to prevent accidental sliding or loosening of moving parts

Support quick release for easy on-site maintenance and module replacement

Automated process platform

Combined with pneumatic control system, achieve remote automatic locking and releasing, and improve operational efficiency

AMAT 0190-18266氣動(dòng)鎖緊組件 產(chǎn)品展示      

 產(chǎn)品視頻

3.其他產(chǎn)品

500MBA01 1MRB150003R0002 1MRB200053-L 控制卡
500MBA02 1MRB150003R0003 1MRB200053-M 控制器模塊
500TRM02 1MRB150011R1 耦合器模塊

4.其他英文產(chǎn)品

BENTLY 3500/15 127610-01 Power supply module
AB91-1 HESG437479R1 HESG437899 Control module
IT94-3 HESG440310R2 HESG112699B Control module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218