AMAT AS00021-02漏水檢測儀模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT AS00021-02 漏水檢測儀模塊

產(chǎn)品概述

AMAT（Applied Materials）AS00021-02 漏水檢測儀模塊是一種用于半導(dǎo)體制造設(shè)備的安全監(jiān)測模塊，主要用于檢測設(shè)備內(nèi)部或關(guān)鍵工藝區(qū)域的液體泄漏。它可以實(shí)時監(jiān)控冷卻液、工藝氣體系統(tǒng)或其他流體管路，檢測到異常液體存在時，觸發(fā)報警或停機(jī)互鎖信號，從而保護(hù)設(shè)備及工藝免受液體泄漏帶來的損壞。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 檢測類型：液體泄漏檢測

• 靈敏度：高靈敏度探頭，可檢測微量液體

• 輸出信號：數(shù)字信號/報警信號，可與控制系統(tǒng)或互鎖系統(tǒng)聯(lián)動

• 接口：兼容 AMAT 控制系統(tǒng)和安全互鎖邏輯

• 環(huán)境適應(yīng)性：適應(yīng)半導(dǎo)體設(shè)備潔凈室及高濕度/溫度環(huán)境

• 安裝方式：模塊化安裝，便于設(shè)備內(nèi)關(guān)鍵點(diǎn)布局

應(yīng)用場景

1. 冷卻系統(tǒng)監(jiān)控

   • 檢測冷卻液管路泄漏，防止設(shè)備過熱或電氣模塊損壞

2. 控制箱與底盤控制箱保護(hù)

   • 監(jiān)測內(nèi)部液體滲入或管路泄漏，避免電子模塊受損

3. 沉積工藝（CVD/PVD/ALD）

   • 監(jiān)控腔體冷卻和輔助液體系統(tǒng)，保證工藝安全運(yùn)行

4. 刻蝕與離子注入設(shè)備

   • 防止液體泄漏影響射頻模塊、泵浦或傳感器，確保工藝穩(wěn)定性

5. 工廠安全與維護(hù)

   • 與互鎖系統(tǒng)聯(lián)動，發(fā)現(xiàn)漏水立即報警或停機(jī)，保護(hù)操作人員和設(shè)備安全

AMAT  AS00021-02漏水檢測儀模塊 英文資料：

AMAT AS00021-02 Water Leakage Detector Module

Product Overview

The AMAT (Applied Materials) AS00021-02 leak detector module is a safety monitoring module used in semiconductor manufacturing equipment, mainly for detecting liquid leaks inside equipment or critical process areas. It can monitor coolant, process gas systems, or other fluid pipelines in real-time. When abnormal liquid is detected, it triggers an alarm or shutdown interlock signal to protect equipment and processes from damage caused by liquid leakage.

Technical parameters (typical direction, specific data should refer to the original factory information)

Detection type: Liquid leakage detection

Sensitivity: High sensitivity probe, capable of detecting trace liquids

Output signal: digital signal/alarm signal, can be linked with control system or interlock system

Interface: Compatible with AMAT control system and safety interlock logic

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and high humidity/temperature environments

Installation method: Modular installation for easy layout of key points within the equipment

Application scenarios

Cooling system monitoring

Detect coolant pipeline leaks to prevent equipment overheating or electrical module damage

Control box and chassis control box protection

Monitor internal liquid infiltration or pipeline leakage to avoid damage to electronic modules

Deposition process (CVD/PVD/ALD)

Monitor the cooling and auxiliary liquid system of the monitoring chamber to ensure safe operation of the process

Etching and ion implantation equipment

Prevent liquid leakage from affecting RF modules, pumps, or sensors to ensure process stability

Factory Safety and Maintenance

Linked with the interlocking system, if water leakage is detected, an immediate alarm or shutdown will be triggered to protect the safety of operators and equipment

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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