AMAT 0010-02657冷卻室組件

1.產(chǎn) 品 資 料 介 紹：

AMAT 0010-02657 冷卻室組件

產(chǎn)品概述

AMAT（Applied Materials）0010-02657 冷卻室組件是半導(dǎo)體制造設(shè)備中用于熱管理與溫控的核心模塊。它主要通過液體或氣體循環(huán)系統(tǒng)，將設(shè)備關(guān)鍵部件（如反應(yīng)腔體、加熱器、電源模塊、控制箱等）產(chǎn)生的熱量有效帶走，維持設(shè)備運(yùn)行溫度在工藝允許范圍內(nèi)，確保工藝精度和設(shè)備穩(wěn)定性。冷卻室組件在沉積、刻蝕和離子注入等高功率工藝中尤為重要。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 冷卻方式：液體循環(huán)或氣冷（視具體設(shè)備而定）

• 適用功率范圍：高功率工藝模塊的熱量散熱

• 溫度控制：支持精確溫控，保證工藝溫度穩(wěn)定

• 接口：流體進(jìn)出口接口、溫度傳感器接口

• 材料與環(huán)境適應(yīng)性：耐腐蝕、耐高溫材料，適應(yīng)潔凈室環(huán)境

• 模塊化設(shè)計：便于安裝、維護(hù)和更換

應(yīng)用場景

1. 沉積工藝（CVD/PVD/ALD）

   • 冷卻反應(yīng)腔體和加熱器模塊，保持腔體溫度均勻，確保薄膜沉積一致性

   • 避免過熱導(dǎo)致薄膜缺陷或設(shè)備損壞

2. 刻蝕工藝設(shè)備

   • 冷卻射頻功率模塊、電源模塊和腔體，保證刻蝕精度和等離子體穩(wěn)定性

3. 離子注入系統(tǒng)

   • 控制離子源和掃描系統(tǒng)溫度，保持劑量和能量一致性

   • 避免溫升影響器件加工精度

4. 控制箱與底盤控制箱

   • 冷卻電子模塊和電源模塊，延長模塊壽命，提高系統(tǒng)可靠性

5. 研發(fā)與實(shí)驗(yàn)室平臺

   • 提供穩(wěn)定溫控環(huán)境，支持工藝開發(fā)和實(shí)驗(yàn)驗(yàn)證

AMAT  0010-02657冷卻室組件 英文資料：

AMAT 0010-02657 Cooling Chamber Component

Product Overview

AMAT (Applied Materials) 0010-02657 cooling chamber component is a core module used for thermal management and temperature control in semiconductor manufacturing equipment. It mainly uses liquid or gas circulation systems to effectively remove the heat generated by key components of the equipment (such as reaction chambers, heaters, power modules, control boxes, etc.), maintain the operating temperature of the equipment within the allowable range of the process, and ensure process accuracy and equipment stability. Cooling chamber components are particularly important in high-power processes such as deposition, etching, and ion implantation.

Technical parameters (typical direction, specific data should refer to the original factory information)

Cooling method: liquid circulation or air cooling (depending on the specific equipment)

Applicable power range: Heat dissipation for high-power process modules

Temperature control: supports precise temperature control to ensure stable process temperature

Interface: Fluid inlet and outlet interface, temperature sensor interface

Material and environmental adaptability: corrosion-resistant and high-temperature resistant materials, suitable for clean room environments

Modular design: easy to install, maintain, and ｒｅｐｌａｃｅ

Application scenarios

Deposition process (CVD/PVD/ALD)

Cool the reaction chamber and heater module to maintain uniform chamber temperature and ensure consistent film deposition

Avoid film defects or equipment damage caused by overheating

Etching process equipment

Cooling RF power module, power module, and cavity to ensure etching accuracy and plasma stability

Ion implantation system

Control the temperature of the ion source and scanning system to maintain consistency in dose and energy

Avoid temperature rise affecting device processing accuracy

Control box and chassis control box

Cooling electronic modules and power modules, extending module lifespan, and improving system reliability

R&D and laboratory platform

Provide a stable temperature control environment, support process development and experimental verification

AMAT 0010-02657冷卻室組件 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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