AMAT Applied Materials 0090-77327電子流量計
1.產 品 資 料 介 紹：
核心規(guī)格
功能特點
典型應用
AMAT Applied Materials 0090-77327電子流量計 英文資料：
AMAT 0090-77327 is a high-precision, corrosion-resistant plug-in electronic flowmeter designed by Applied Materials for semiconductor equipment cooling and process fluid monitoring. It adopts the principle of electromagnetic induction and is suitable for flow measurement of cooling water, deionized water, and low concentration acid alkali solutions on platforms such as Centura, Endura, P5000, etc.
Core specifications
Project specifications/characteristics remarks
Type: Plug in electromagnetic flowmeter suitable for small-diameter pipelines
Measurement medium: Conductive liquid (≥ 20 μ S/cm), cooling water, DI water, weak acid-base solution
Caliber DN10- DN20 (optional) Customized small caliber
High precision measurement with an accuracy of ± 0.5% FS (v>0.6 m/s) or ± 3 mm/s (v ≤ 0.6 m/s)
Flow velocity range 0.01-10 m/s bidirectional measurement
Lining materials PVDF, PFA, ceramic resistant to chemical corrosion
Electrode material 316L stainless steel, titanium, tantalum suitable for different media
Supply voltage 24 VDC ± 10% industrial standard power supply
Output signal 4-20 mA, pulse, RS485 (Modbus RTU) compatible with AMAT control system
Operating temperature 0-50 ℃, suitable for internal environment of equipment
Protection level IP65 dustproof and waterproof
Installation method: threaded or flange insertion for easy on-site installation
Features
High precision measurement: small aperture design, high resolution, suitable for monitoring trace liquid flow.
Strong corrosion resistance: PVDF/PFA/ceramic lining and various electrode materials, suitable for various chemical media.
Strong anti-interference ability: fully digital signal processing, optoelectronic isolation, adaptable to complex electromagnetic environments.
Diverse signals: 4-20 mA, pulse, RS485 output, easy to connect to PLC or upper computer.
Low pressure loss: Plug in structure with minimal impact on pipeline pressure.
Typical Applications
Monitoring of cooling water flow in wafer transfer system
Process chamber DI water supply monitoring
Flow control of chemical transportation pipelines
Deionized water system metering
AMAT Applied Materials 0090-77327電子流量計 產品展示
產品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
