Gasonics UNO-1497溫度控制器
1.產(chǎn) 品 資 料 介 紹:
產(chǎn)品名稱
Gasonics UNO-1497 溫度控制器
(英文:Temperature Controller Module)
一、產(chǎn)品概述
Gasonics UNO-1497 是 Gasonics 系列等離子灰化、清洗設(shè)備中使用的 專用溫度控制器模塊,用于精確調(diào)節(jié)并監(jiān)測工藝腔體、加熱器、熱板等部位的溫度。該控制器能夠?qū)崟r采集熱電偶信號,并輸出控制信號給加熱元件,實現(xiàn)閉環(huán)溫度控制,確保工藝一致性和熱穩(wěn)定性。
二、技術(shù)參數(shù)
模塊類型:溫度控制器 / 工藝溫控模塊
溫度輸入信號:
支持 K 型、J 型等標準熱電偶輸入
控制通道:
單通道或多通道溫控(取決于配置)
控制輸出:
模擬電壓 / 電流信號控制加熱器
或繼電器/SSR 信號輸出控制加熱電源
控制方式:
PID 閉環(huán)控制(自動或手動模式)
輸出功率控制精度:
可設(shè)定上下限報警值與比例/積分/微分參數(shù)
供電要求:
+24 VDC 或 ±15 VDC(依設(shè)備配置)
通訊接口:
與主控模塊通過背板或串行接口通信
狀態(tài)顯示:
前面板帶有溫度顯示窗口和報警狀態(tài)指示燈
英文資料:
product name
Gasonics UNO-1497 Temperature Controller
(Temperature Controller Module)
1、 Product Overview
Gasonics UNO-1497 is a specialized temperature controller module used in the Gasonics series plasma ashing and cleaning equipment to accurately regulate and monitor the temperature of process chambers, heaters, hot plates, and other parts. This controller is capable of real-time acquisition of thermocouple signals and outputting control signals to heating elements, achieving closed-loop temperature control and ensuring process consistency and thermal stability.
2、 Technical parameters
Module Type: Temperature Controller/Process Temperature Control Module
Temperature input signal:
Supports standard thermocouple inputs such as K-type and J-type
Control channel:
Single channel or multi-channel temperature control (depending on configuration)
Control output:
Simulate voltage/current signal to control heater
Or relay/SSR signal output controls heating power supply
Control method:
PID closed-loop control (automatic or manual mode)
Output power control accuracy:
Can set upper and lower limit alarm values and proportional/integral/derivative parameters
Power supply requirements:
+24 VDC or ± 15 VDC (depending on equipment configuration)
Communication interface:
Communicate with the main control module through the backplane or serial interface
Status display:
The front panel is equipped with a temperature display window and an alarm status indicator light
2.產(chǎn) 品 展 示

3.其他產(chǎn)品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




