Gasonics A90-039-02電流傳感器模塊
1.產(chǎn) 品 資 料 介 紹:
產(chǎn)品名稱
Gasonics A90-039-02 電流傳感器模塊
(英文:Current Sensor Module)
一、產(chǎn)品概述
Gasonics A90-039-02 是專用于 Gasonics 系列等離子清洗/灰化設(shè)備中的 電流監(jiān)測模塊,用于實時檢測設(shè)備內(nèi)部電源回路、電磁閥、加熱單元、射頻系統(tǒng)等關(guān)鍵部件的工作電流。該模塊提供隔離信號輸出,傳送至主控系統(tǒng)用于工藝控制、安全保護及故障報警。
二、技術(shù)參數(shù)
模塊類型:電流傳感器 / 電流檢測模塊
設(shè)備適配:適用于 Gasonics Aura、L2100、L3510、AE2001 等設(shè)備
測量范圍:典型電流范圍為 0–20A(視具體配置)
輸出信號:
模擬電壓輸出(比例輸出,典型為 0–5V 或 0–10V)
或電流信號(如 4–20 mA,視設(shè)備配置)
電氣隔離:具備輸入與輸出之間的光電/磁隔離
安裝方式:模塊化卡件結(jié)構(gòu),可插拔安裝于設(shè)備背板或功能卡架中
接口方式:標(biāo)準(zhǔn)端子或排線連接至主控制模塊或數(shù)據(jù)采集卡
供電要求:+15V 或 +24V DC
指示功能:模塊面板可能帶有運行狀態(tài) LED
英文資料:
product name
Gasonics A90-039-02 Current Sensor Module
(English: Current Sensor Module)
1、 Product Overview
Gasonics A90-039-02 is a current monitoring module specifically designed for the Gasonics series plasma cleaning/ashing equipment, used for real-time detection of the working current of key components such as internal power circuits, solenoid valves, heating units, and RF systems. This module provides isolated signal output, which is transmitted to the main control system for process control, safety protection, and fault alarm.
2、 Technical parameters
Module Type: Current Sensor/Current Detection Module
Equipment adaptation: Suitable for Gasonics Aura, L2100, L3510, AE2001 and other devices
Measurement range: Typical current range is 0-20A (depending on specific configuration)
Output signal:
Analog voltage output (proportional output, typically 0-5V or 0-10V)
Or current signal (e.g. 4-20 mA, depending on device configuration)
Electrical isolation: with photoelectric/magnetic isolation between input and output
Installation method: Modular card structure, pluggable and installed in the equipment backplane or functional card rack
Interface method: Connect standard terminals or ribbon cables to the main control module or data acquisition card
Power supply requirements:+15V or+24V DC
Indication function: The module panel may have a running status LED
2.產(chǎn) 品 展 示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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