Gasonics 90-2736 控制器模塊
1.產(chǎn) 品 資 料 介 紹：
產(chǎn)品名稱
Gasonics 90-2736 控制器模塊
（英文：Gasonics Controller Module）
一、產(chǎn)品概述
Gasonics 90-2736 控制器模塊是應(yīng)用于 Gasonics 系列等離子體灰化設(shè)備中的核心控制部件，主要用于協(xié)調(diào)設(shè)備內(nèi)部各子系統(tǒng)的運(yùn)行狀態(tài)，包括氣體流量、溫控、射頻匹配、電源分配等。該模塊作為設(shè)備主控系統(tǒng)的組成部分，與其他 I/O 卡、閥控卡、溫控模塊等配合，實(shí)現(xiàn)全自動工藝控制邏輯。
二、技術(shù)參數(shù)
模塊類型：主控制器/系統(tǒng)控制邏輯模塊
所屬設(shè)備平臺：Gasonics Aura、L2100、L3510、AE2001 等系列等離子體設(shè)備
接口類型：
背板連接（Backplane Bus）
標(biāo)準(zhǔn)信號線連接至 I/O 控制板、閥控模塊、溫控卡等
輸入信號：
來自操作界面、傳感器（溫度、壓力、RF功率）
輸出控制：
發(fā)出控制信號至閥控、電源、溫控、電磁繼電器等子模塊
功能特性：
工藝序列控制
安全互鎖邏輯管理
故障報(bào)警觸發(fā)與狀態(tài)回饋
電源需求：+5V、+12V 或 ±15V DC（視具體硬件配置）
狀態(tài)反饋：帶 LED 狀態(tài)燈，用于顯示運(yùn)行與故障狀態(tài)
英文資料：
product name
Gasonics 90-2736 Controller Module
Gasonics Controller Module
1、 Product Overview
The Gasonics 90-2736 controller module is the core control component applied in the Gasonics series plasma ashing equipment, mainly used to coordinate the operation status of various subsystems inside the equipment, including gas flow rate, temperature control, RF matching, power distribution, etc. As a component of the equipment control system, this module works in conjunction with other I/O cards, valve control cards, temperature control modules, etc. to achieve fully automatic process control logic.
2、 Technical parameters
Module Type: Main Controller/System Control Logic Module
Equipment platform: Gasonics Aura, L2100, L3510, AE2001 and other series plasma equipment
Interface type:
Backplane Bus connection
Standard signal lines are connected to I/O control boards, valve control modules, temperature control cards, etc
Input signal:
From the operating interface, sensors (temperature, pressure, RF power)
Output control:
Send control signals to sub modules such as valve control, power supply, temperature control, electromagnetic relay, etc
Functional features:
Process sequence control
Security interlock logic management
Fault alarm triggering and status feedback
Power requirements:+5V,+12V, or ± 15V DC (depending on specific hardware configuration)
Status feedback: equipped with LED status lights, used to display operation and fault status
2.產(chǎn) 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
