Gasonics 90-1002-02閥控制模塊
1.產(chǎn) 品 資 料 介 紹：
產(chǎn)品名稱
Gasonics 90-1002-02 閥控制模塊
（英文：Valve Control Module）
一、產(chǎn)品概述
Gasonics 90-1002-02 閥控制模塊是 Gasonics（現(xiàn)為 Novellus Systems，一部分并入 Lam Research）等離子體灰化和清洗設(shè)備中用于 控制氣體或真空系統(tǒng)閥門開閉 的關(guān)鍵部件。該模塊通過接收來自主控系統(tǒng)的控制信號，實現(xiàn)多個氣路閥門的精準(zhǔn)開關(guān)控制，確保等離子工藝過程中氣體流量和工藝氣氛的準(zhǔn)確調(diào)節(jié)。
二、技術(shù)參數(shù)
設(shè)備類型：氣體/真空閥門控制模塊
控制通道：多通道電磁閥控制（具體通道數(shù)視配置而定）
輸入信號：
TTL 或 24VDC 控制信號（來自主控板或 PLC）
輸出形式：
控制電磁閥開啟或關(guān)閉狀態(tài)（ON/OFF）
供電要求：
一般為 +24 VDC（模塊供電與閥驅(qū)動）
狀態(tài)指示：
板載 LED 指示每通道閥門狀態(tài)
接口方式：
插槽式連接或背板連接
與主控制器或 I/O 卡通過內(nèi)部總線通信
適配機(jī)型：
兼容 Gasonics Aura、L3510、L2100、AE2001 等多型號等離子體設(shè)備
英文資料：
product name
Gasonics 90-1002-02 Valve Control Module
Valve Control Module
1、 Product Overview
The Gasonics 90-1002-02 valve control module is a key component used in Gasonics (now known as Novellus Systems, partially integrated into Lam Research) plasma ashing and cleaning equipment to control the opening and closing of gas or vacuum system valves. This module achieves precise on/off control of multiple gas path valves by receiving control signals from the main control system, ensuring accurate adjustment of gas flow rate and process atmosphere during the plasma process.
2、 Technical parameters
Equipment type: Gas/Vacuum Valve Control Module
Control channel: Multi channel solenoid valve control (the specific number of channels depends on the configuration)
Input signal:
TTL or 24VDC control signal (from main control board or PLC)
Output format:
Control the opening or closing status of the solenoid valve (ON/OFF)
Power supply requirements:
Usually+24 VDC (module power supply and valve drive)
Status indication:
Onboard LED indicates the status of each channel valve
Interface method:
Slot type connection or backplane connection
Communicate with the main controller or I/O card through an internal bus
Compatible models:
Compatible with multiple plasma equipment models such as Gasonics Aura, L3510, L2100, AE2001, etc
2.產(chǎn) 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
