Gasonics 90-1033-02溫度控制卡
1.產(chǎn) 品 資 料 介 紹：
產(chǎn)品名稱
Gasonics 90-1033-02 溫度控制卡
產(chǎn)品應(yīng)用領(lǐng)域
半導(dǎo)體設(shè)備溫控系統(tǒng)
主要用于 Gasonics 等品牌的等離子體清洗機(jī)、灰化設(shè)備等半導(dǎo)體制造設(shè)備中，對(duì)工藝腔體溫度進(jìn)行精確控制，確保清洗和刻蝕工藝穩(wěn)定。真空腔體溫度調(diào)節(jié)
在真空環(huán)境下的等離子處理過(guò)程中，溫度控制卡可通過(guò)反饋機(jī)制調(diào)節(jié)加熱元件的輸出，保持腔體或工件表面溫度恒定，避免熱漂移。等離子灰化工藝控制
用于控制反應(yīng)腔體加熱區(qū)域的溫度曲線，確保光刻膠去除過(guò)程中的溫度穩(wěn)定性，提高處理一致性和良率。熱處理平臺(tái)溫度穩(wěn)定系統(tǒng)
適用于控制加熱臺(tái)、熱板等溫度控制組件，實(shí)現(xiàn)多點(diǎn)溫度監(jiān)測(cè)和閉環(huán)調(diào)節(jié)，提高熱處理均勻性。工業(yè)自動(dòng)化溫度調(diào)節(jié)
在某些與Gasonics設(shè)備集成的自動(dòng)化系統(tǒng)中，該卡也可能被用于工業(yè)過(guò)程中的精密溫控應(yīng)用，例如自動(dòng)化工站中的材料預(yù)熱系統(tǒng)。設(shè)備維護(hù)與替換配件市場(chǎng)
作為 Gasonics 原廠設(shè)備的關(guān)鍵控制部件，常用于設(shè)備維護(hù)、備件更換和系統(tǒng)升級(jí)，以維持設(shè)備在最佳狀態(tài)下運(yùn)行。
英文資料：
product name
Gasonics 90-1033-02 Temperature Control Card
Product application areas
Semiconductor equipment temperature control system
Mainly used in semiconductor manufacturing equipment such as plasma cleaning machines and ashing equipment of Gasonics and other brands, it precisely controls the temperature of the process chamber to ensure stable cleaning and etching processes.
Vacuum chamber temperature regulation
During plasma processing in a vacuum environment, the temperature control card can adjust the output of the heating element through a feedback mechanism to maintain a constant temperature of the cavity or workpiece surface and avoid thermal drift.
Plasma ashing process control
Used to control the temperature curve of the heating area in the reaction chamber, ensuring temperature stability during the photoresist removal process, and improving processing consistency and yield.
Temperature stabilization system for heat treatment platform
Suitable for controlling temperature control components such as heating tables and hot plates, achieving multi-point temperature monitoring and closed-loop regulation, and improving the uniformity of heat treatment.
Industrial automation temperature regulation
In some automation systems integrated with Gasonics equipment, this card may also be used for precision temperature control applications in industrial processes, such as material preheating systems in automated chemical plants.
Market for equipment maintenance and replacement parts
As a key control component of Gasonics original equipment, it is commonly used for equipment maintenance, spare parts replacement, and system upgrades to maintain optimal equipment operation.
2.產(chǎn) 品 展 示
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| PMB33C-00200-02 | AMAT 0100-0075 | M22NRXC-LNN-NS-00 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
