Gasonics 27-286643-00控制器板模塊
1.產(chǎn) 品 資 料 介 紹：
產(chǎn)品名稱
Gasonics 27-286643-00 控制器板模塊
產(chǎn)品應(yīng)用領(lǐng)域
等離子灰化設(shè)備核心控制模塊
應(yīng)用于 Gasonics Aura 2000LL 等型號(hào)的等離子去膠、灰化處理系統(tǒng)，作為設(shè)備主控邏輯核心。工藝流程邏輯控制
管理整個(gè)工藝流程的信號(hào)處理、順序執(zhí)行、參數(shù)設(shè)定及過程聯(lián)鎖，確保設(shè)備按設(shè)定邏輯自動(dòng)運(yùn)行。子系統(tǒng)協(xié)調(diào)調(diào)度
控制并協(xié)調(diào)射頻電源、真空泵、氣路系統(tǒng)、晶圓搬運(yùn)平臺(tái)等多個(gè)子系統(tǒng)協(xié)同工作。信號(hào)處理與命令執(zhí)行
接收來自操作界面或上位機(jī)的控制命令，執(zhí)行工藝參數(shù)配置和過程啟動(dòng)、暫停、報(bào)警等功能。固件邏輯存儲(chǔ)與執(zhí)行
板上可配置 EPROM 固件，用于存儲(chǔ)控制程序邏輯，實(shí)現(xiàn)版本管理和功能定制。設(shè)備維修與模塊更換
常用作設(shè)備控制故障后的替換模塊，恢復(fù)系統(tǒng)功能，是設(shè)備維護(hù)保養(yǎng)中的關(guān)鍵備件。
英文資料：
product name
Gasonics 27-286643-00 Controller Board Module
Product application areas
Core control module of plasma ashing equipment
Applied to plasma debonding and ashing processing systems of Gasonics Aura 2000LL and other models, serving as the main control logic core of the equipment.
Process logic control
Manage the signal processing, sequential execution, parameter setting, and process interlocking of the entire process flow to ensure that the equipment operates automatically according to the set logic.
Subsystem coordination and scheduling
Control and coordinate the collaborative work of multiple subsystems such as RF power supply, vacuum pump, gas path system, wafer handling platform, etc.
Signal processing and command execution
Receive control commands from the operating interface or upper computer, perform process parameter configuration and functions such as process start, pause, alarm, etc.
Firmware Logical Storage and Execution
EPROM firmware can be configured on the board to store control program logic, achieve version management, and customize functions.
Equipment maintenance and module replacement
Commonly used as a replacement module for equipment control failures to restore system functionality, it is a key spare part in equipment maintenance and upkeep.
2.產(chǎn) 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
