AMAT Applied Materials 0100-A0019射頻匹配探測器

1.產(chǎn) 品 資 料 介 紹：

AMAT Applied Materials 0100-A0019射頻匹配探測器 英文資料：

1、 High precision RF parameter detection: laying the foundation for impedance matching

As the "sensing core" of the RF matching system, the 0100-A0019 RF matching detector focuses on accurately capturing RF signal parameters, providing data support for real-time impedance adjustment, and ensuring RF energy transmission efficiency:

Broadband parameter coverage capability

Adapting to mainstream RF frequency bands in semiconductor processes, covering key frequency bands such as 13.56MHz, 27.12MHz, and 40.68MHz, it can accurately detect RF signal parameters in different process scenarios, including forward power (detection range 0-5000W, accuracy ± 0.5%), reflected power (detection range 0-1000W, accuracy ± 1%), standing wave coefficient (VSWR, detection range 1.0-3.0, resolution 0.01), and load impedance (detection range 10-500 Ω, accuracy ± 2 Ω). It fully adapts to the differentiated RF frequency requirements of different processes such as etching and deposition, and can meet multi scenario applications without replacing detection modules.

High response speed and data sampling

Adopting high-sensitivity RF sensing chip and differential detection circuit design (similar to source differential drive structure), the signal response time is ≤ 1 μ s, and the dynamic changes of RF power and impedance can be tracked in real time; Equipped with a 1MHz high-speed sampling module, it completes 1000 parameter acquisitions and data outputs per second, ensuring that instantaneous impedance shifts can still be captured during plasma concentration changes (such as gas switching in the etching chamber), providing timely data support for rapid adjustment of the matching network.

Multi parameter synchronous detection capability

Support synchronous detection and output of parameters such as forward power, reflected power, voltage standing wave ratio (VSWR), phase difference, etc. The parameter acquisition channels are isolated from each other (isolation degree ≥ 40dB) to avoid cross interference; The phase difference detection accuracy reaches ± 1 °, which can accurately reflect the phase change of the RF signal at the load end. Combined with power parameters, the load impedance value is calculated, providing accurate basis for adjusting the capacitance and inductance of the matching network, making the impedance matching error ≤ 5%.

AMAT Applied Materials 0100-A0019射頻匹配探測器 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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