AMAT Applied Materials 0010-42744射頻匹配器

1.產(chǎn) 品 資 料 介 紹：

核心功能

• 自動(dòng)調(diào)諧：內(nèi)置伺服電機(jī)驅(qū)動(dòng)可變電容和電感，實(shí)時(shí)跟蹤負(fù)載阻抗變化
• 反射功率抑制：通過(guò)定向耦合器和相位 / 幅度檢測(cè)，閉環(huán)調(diào)節(jié)使反射功率最小化
• 功率范圍：典型支持 0–1000W 射頻功率，適配多種工藝設(shè)備
• 頻率特性：固定工作于 13.56MHz（工業(yè)標(biāo)準(zhǔn)等離子體激發(fā)頻率）
• 通信接口：提供 RS-485、Ethernet 或?qū)Ｓ每偩€，支持與上位機(jī) / 控制器集成

技術(shù)特點(diǎn)

典型應(yīng)用

• 刻蝕設(shè)備：射頻耦合腔、極板匹配
• PECVD 沉積設(shè)備：反應(yīng)腔阻抗匹配
• 濺射設(shè)備：靶材射頻功率高效傳輸
• 離子注入機(jī)：射頻源與匹配網(wǎng)絡(luò)優(yōu)化

AMAT Applied Materials 0010-42744射頻匹配器 英文資料：

AMAT Applied Materials 0010-42744 is an automatic RF matching device used to dynamically match the impedance of RF power sources and loads (such as reaction chambers and plasma sources) in semiconductor manufacturing equipment, achieving efficient power transmission in the 13.56MHz frequency band and reducing reflected power.

core functionality

Automatic tuning: Built in servo motor drives variable capacitors and inductors, real-time tracking of load impedance changes

Reflection power suppression: By using directional couplers and phase/amplitude detection, closed-loop adjustment minimizes the reflection power

Power range: Typical support for 0-1000W RF power, compatible with various process equipment

Frequency characteristics: Fixed operating at 13.56MHz (industrial standard plasma excitation frequency)

Communication interface: Provides RS-485, Ethernet or dedicated bus, supports integration with upper computer/controller

Technical Features

Project parameters/characteristics

Frequency 13.56MHz (fixed)

Power capacity 0-1000W (typical value)

Matching range 5-500 Ω (adjustable)

Typical tuning time<100ms (full range)

Interface form: N-type or SMA RF interface

Protection functions include over power, over reflection, and over heat protection

Mechanical specification standard 19 "rack or chassis installation

Typical Applications

Etching equipment: RF coupling cavity, electrode matching

PECVD deposition equipment: impedance matching of reaction chamber

Sputtering equipment: efficient transmission of target RF power

Ion implantation machine: RF source and matching network optimization

AMAT Applied Materials  0010-42744射頻匹配器 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218