AMAT Applied Materials 0190-76190 壓力控制器
1.產(chǎn) 品 資 料 介 紹：
核心技術(shù)參數(shù)
功能特點(diǎn)
典型應(yīng)用
AMAT Applied Materials 0190-76190 壓力控制器 英文資料：
The AMAT Applied Materials 0190-76190 pressure controller is a high-precision, programmable closed-loop pressure control module mainly used in semiconductor manufacturing, vacuum coating, plasma processes and other equipment to achieve stable regulation and monitoring of gas or liquid pressure.
Core technical parameters
Typical parameter notes for the project
Pressure measurement range 0-1000 Torr (optional 10-1000 Torr, 1-100 Torr, 0.1-10 Torr) Capacitive thin film sensor (CDG)
Control accuracy ± 0.1% F.S. temperature compensation design
Resolution 0.1 mTorr (low range) -1 Torr (high range) configurable
Response time ≤ 100 ms PID closed-loop control
Communication interface RS-232, 0-5 V, 0-10 V, 4-20 mA (optional EtherCAT, Profibus) supports Modbus RTU
Display mode: 4-digit LCD display (pressure/status) with switchable units (Torr, mTorr, Pa, bar, psi)
Power supply 24 VDC (18-30 VDC wide voltage) power consumption<10 W
Pressure interface VCR or NPT 1/4 "customizable
Working temperature/humidity 0-50 ℃, ≤ 90% RH (non condensing), suitable for industrial grade environments
Mechanical size 1/2 or 1/4 rack installation support panel/rail installation
Features
Automatic PID regulation: Built in adjustable PID parameters to ensure fast and stable control.
Dual channel control: It can simultaneously control the intake and exhaust valves, achieving bidirectional adjustment of vacuum and positive pressure.
Multi range switching: Flexibly switch different measurement ranges according to process requirements to ensure high precision across the entire range.
Protection function: equipped with overvoltage, undervoltage, sensor fault alarm and automatic output cut-off.
Remote monitoring: Remote setting and real-time data collection are achieved through digital or analog interfaces.
Typical Applications
Semiconductor etching PECVD、 Chamber pressure control of sputtering equipment
Vacuum degree adjustment of vacuum coating and electron beam evaporation system
Pressure Stability Control of High Temperature and Vacuum Furnaces
Laboratory gas flow and pressure joint control system
AMAT Applied Materials 00190-76190 壓力控制器 產(chǎn)品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
