AMAT Applied Materials 0190-24116分析輸入輸出模塊

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品概述

AMAT 0190-24116 分析輸入輸出模塊是 Applied Materials 半導(dǎo)體設(shè)備中的關(guān)鍵信號接口模塊。它用于采集、處理和輸出設(shè)備傳感器及工藝監(jiān)控信號，實現(xiàn)工藝參數(shù)的精確監(jiān)控和控制。該模塊可連接溫度傳感器、壓力傳感器、流量計等多種監(jiān)測裝置，將信號傳輸至主控制器或數(shù)字控制系統(tǒng)，為半導(dǎo)體工藝提供實時數(shù)據(jù)反饋和控制依據(jù)。

技術(shù)參數(shù)（典型特征）

• 類型：分析輸入/輸出模塊（I/O Module）

• 功能：信號采集、信號輸出、數(shù)據(jù)傳輸

• 信號類型：模擬量（如電壓、電流）及數(shù)字量輸入輸出

• 通道數(shù)量：多通道設(shè)計，可同時處理多路輸入輸出（具體數(shù)量依設(shè)備而定）

• 接口形式：標(biāo)準(zhǔn)模塊化插槽接口，兼容控制系統(tǒng)總線

• 工作環(huán)境：半導(dǎo)體設(shè)備內(nèi)部，耐高溫、抗干擾、潔凈室兼容

• 適用設(shè)備：Applied Materials 各類沉積（CVD/PVD）、刻蝕（Etch）、離子注入、熱處理設(shè)備

應(yīng)用場景

1. 工藝數(shù)據(jù)采集

   • 采集溫度、壓力、流量、液位等傳感器數(shù)據(jù)，提供實時反饋。

2. 控制信號輸出

   • 向閥門、加熱器、泵、執(zhí)行器等子系統(tǒng)輸出控制指令。

3. 設(shè)備監(jiān)控與報警

   • 監(jiān)測工藝參數(shù)異常并向控制器發(fā)送信號，實現(xiàn)報警和保護(hù)。

4. 工藝優(yōu)化與追溯

   • 提供精確的輸入輸出數(shù)據(jù)，為工藝優(yōu)化和質(zhì)量追溯提供依據(jù)。

AMAT Applied Materials 0190-24116分析輸入輸出模塊 英文資料：

Product Overview

AMAT 0190-24116 Analysis Input/Output Module is a key signal interface module in Applied Materials semiconductor equipment. It is used to collect, process, and output device sensors and process monitoring signals, achieving precise monitoring and control of process parameters. This module can connect various monitoring devices such as temperature sensors, pressure sensors, flow meters, etc., and transmit signals to the main controller or digital control system, providing real-time data feedback and control basis for semiconductor processes.

Technical parameters (typical features)

Type: Analysis Input/Output Module (I/O Module)

Function: Signal acquisition, signal output, data transmission

Signal types: analog (such as voltage, current) and digital input/output

Number of channels: Multi channel design, capable of processing multiple inputs and outputs simultaneously (the specific number depends on the device)

Interface form: Standard modular slot interface, compatible with control system bus

Working environment: Inside semiconductor equipment, high temperature resistance, anti-interference, and cleanroom compatibility

Applicable equipment: Various deposition (CVD/PVD), etching (Etch), ion implantation, and heat treatment equipment of Applied Materials

Application scenarios

Process data collection

Collect sensor data such as temperature, pressure, flow rate, and liquid level, and provide real-time feedback.

Control signal output

Output control commands to subsystems such as valves, heaters, pumps, and actuators.

Equipment monitoring and alarm

Monitor abnormal process parameters and send signals to the controller to achieve alarm and protection.

Process optimization and traceability

Provide accurate input and output data to provide a basis for process optimization and quality traceability.

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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