AMAT 0010-23716氣門執(zhí)行器
1.產 品 資 料 介 紹：
中文資料：
關于 AMAT（Applied Materials）0010-23716 氣門執(zhí)行器，以下是詳細的技術與應用信息：
一、基本信息
| 項目 | 內容 |
|---|---|
| 制造商 | Applied Materials（應用材料公司） |
| 部件型號 | 0010-23716 |
| 設備類型 | 氣門執(zhí)行器（Valve Actuator） |
| 典型用途 | 半導體設備中的氣體流量控制系統，如 CVD、PVD、Etch 等工藝 |
二、功能與用途
該執(zhí)行器通常作為 真空閥門或氣體閥門的驅動單元，在 AMAT 的各種真空系統設備中負責精密控制氣體或真空的開關狀態(tài)。
主要功能：
控制過程氣體的啟閉（如氬氣、氟化物、氮氣等）
實現高速、精準的氣體切換
配合 MFC（質量流量控制器）或壓力控制系統使用
支持高真空或超高真空環(huán)境下的操作
三、可能規(guī)格（推測性信息，根據AMAT執(zhí)行器常見標準）：
| 項目 | 參數說明 |
|---|---|
| 驅動方式 | 氣動（Pneumatic）或電動（某些版本） |
| 響應時間 | < 100ms（高速氣體響應需求） |
| 材質 | 不銹鋼/鋁合金外殼，適用于潔凈室環(huán)境 |
| 接口 | 與 AMAT 腔體控制系統（如 CENTURA、ENDURA）集成 |
| 適配閥門類型 | Gate Valve / Pendulum Valve / Bypass Valve 等 |
| 真空兼容性 | 高真空級別（HV）或超高真空（UHV）等級 |
英文資料：
Regarding the AMAT (Applied Materials) 0010-23716 valve actuator, the following is detailed technical and application information:
1、 Basic Information
Project Content
Manufacturer Applied Materials
Component model 0010-23716
Equipment type: Valve actuator
Gas flow control systems in typical semiconductor equipment, such as CVD, PVD, Etch and other processes
2、 Function and purpose
This actuator is usually used as the driving unit for vacuum valves or gas valves, responsible for precise control of the on/off status of gas or vacuum in various vacuum system equipment of AMAT.
Main functions:
Control the opening and closing of process gases (such as argon, fluoride, nitrogen, etc.)
Realize high-speed and precise gas switching
Used in conjunction with MFC (Mass Flow Controller) or pressure control system
Support operation in high vacuum or ultra-high vacuum environments
3、 Possible specifications (speculative information, based on common standards for AMAT actuators):
Project parameter description
Drive mode: Pneumatic or electric (some versions)
Response time<100ms (high-speed gas response requirement)
Material: Stainless steel/aluminum alloy shell, suitable for clean room environment
Integration of interfaces with AMAT cavity control systems (such as CENTURA, ENDURA)
Suitable for valve types such as Gate Valve, Pendulum Valve, Bypass Valve, etc
Vacuum compatibility high vacuum level (HV) or ultra-high vacuum level (UHV)
2.產 品 展 示
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