ENI OEM-12B-07射頻發(fā)生器 

1.產(chǎn) 品 資 料 介 紹：

中文資料：

ENI（Electronics & Innovation）生產(chǎn)的 OEM-12B-07 型號(hào)是一款射頻（RF）發(fā)生器，廣泛應(yīng)用于工業(yè)和實(shí)驗(yàn)室環(huán)境中的等離子體處理、半導(dǎo)體制造和材料加工等領(lǐng)域。

主要特點(diǎn)：

• 高功率輸出：該射頻發(fā)生器提供高達(dá) 1250W 的功率輸出，適用于需要高功率密度的工藝過程。

• 寬輸入電壓范圍：支持 190-250V 的交流輸入電壓，兼容不同地區(qū)的電力標(biāo)準(zhǔn)。

• 頻率范圍：通常工作在 13.56 MHz 等常見射頻頻率，適應(yīng)多種工業(yè)應(yīng)用需求。

應(yīng)用領(lǐng)域：

• 半導(dǎo)體制造：用于等離子體刻蝕、化學(xué)氣相沉積（CVD）等工藝，為工藝腔體提供穩(wěn)定的射頻能量。

• 材料加工：在等離子體增強(qiáng)化學(xué)氣相沉積（PECVD）和物理氣相沉積（PVD）過程中，用于薄膜沉積和表面改性。

• 工業(yè)加熱：適用于感應(yīng)加熱和電介質(zhì)加熱設(shè)備，如塑料焊接、硅晶體生長等應(yīng)用。

英文資料：

The OEM-12B-07 model produced by ENI (Electronics&Innovation) is a radio frequency (RF) generator widely used in fields such as plasma processing, semiconductor manufacturing, and material processing in industrial and laboratory environments.

Main features:

High power output: This RF generator provides up to 1250W of power output, suitable for processes that require high power density.

Wide input voltage range: Supports AC input voltage of 190-250V, compatible with power standards in different regions.

Frequency range: typically operates at common RF frequencies such as 13.56 MHz, suitable for various industrial application requirements.

Application areas:

Semiconductor manufacturing: used in processes such as plasma etching and chemical vapor deposition (CVD) to provide stable RF energy to the process chamber.

Material processing: Used for thin film deposition and surface modification in plasma enhanced chemical vapor deposition (PECVD) and physical vapor deposition (PVD) processes.

Industrial heating: suitable for induction heating and dielectric heating equipment, such as plastic welding, silicon crystal growth and other applications.

2.產(chǎn)      品      展      示      

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