MKS  AX8403A氣體發(fā)生器

1.產(chǎn) 品 資 料 介 紹：

中文資料：

MKS Instruments 的 AX8403A 是一款臭氧發(fā)生器，主要用于需要高濃度、超潔凈臭氧的工業(yè)和實(shí)驗(yàn)室應(yīng)用。

主要特點(diǎn)：

• 高濃度臭氧輸出：通過無聲放電技術(shù)，將純氧轉(zhuǎn)化為高濃度臭氧，適用于需要高純度臭氧的工藝過程。

• 超潔凈設(shè)計(jì)：所需的摻雜氮?dú)饬繕O少，顯著降低了如 NOx 化合物等污染物的產(chǎn)生，確保臭氧的高純度。

• 靈活的流量范圍：支持 5 至 20 slm 的氧氣流量，滿足不同工藝需求。

應(yīng)用領(lǐng)域：

• 半導(dǎo)體制造：用于晶圓清洗、表面處理和薄膜沉積等工藝。

• 光伏產(chǎn)業(yè)：在太陽能電池生產(chǎn)中，用于表面清潔和鈍化處理。

• 顯示面板制造：用于 LCD 和 OLED 面板的清潔和制程優(yōu)化。

• 醫(yī)療器械消毒：利用臭氧的強(qiáng)氧化性，對(duì)醫(yī)療器械進(jìn)行高效消毒。

技術(shù)規(guī)格：

• 臭氧輸出：高達(dá) 160 克/小時(shí)。

• 氧氣流量范圍：5 至 20 slm。

• 電源要求：208V，三相，50/60 Hz，20A。

• 冷卻要求：需要水冷，水溫范圍 5 至 25°C，最低水流量 7.6 lpm。

• 尺寸和重量：483 x 445 x 267 mm，重量約 59 kg。

英文資料：

The AX8403A from MKS Instruments is an ozone generator primarily used for industrial and laboratory applications that require high concentrations of ultra clean ozone.

Main features:

High concentration ozone output: Through silent discharge technology, pure oxygen is converted into high concentration ozone, suitable for processes that require high-purity ozone.

Ultra clean design: The required amount of nitrogen doping is minimal, significantly reducing the production of pollutants such as NOx compounds and ensuring high purity of ozone.

Flexible flow range: Supports oxygen flow rates of 5 to 20 slm to meet different process requirements.

Application areas:

Semiconductor manufacturing: used for processes such as wafer cleaning, surface treatment, and thin film deposition.

Photovoltaic industry: used for surface cleaning and passivation treatment in solar cell production.

Display panel manufacturing: used for cleaning and process optimization of LCD and OLED panels.

Medical Device Disinfection: Utilizing the strong oxidizing properties of ozone to efficiently disinfect medical devices.

Technical specifications:

Ozone output: up to 160 grams per hour.

Oxygen flow range: 5 to 20 slm.

Power requirements: 208V, three-phase, 50/60 Hz, 20A.

Cooling requirements: Water cooling is required, with a water temperature range of 5 to 25 ° C and a minimum water flow rate of 7.6 lpm.

Size and weight: 483 x 445 x 267 mm, weighing approximately 59 kg.

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