AE MDX-L12直流發(fā)電機(jī)
1.產(chǎn) 品 資 料 介 紹:
中文資料:
Advanced Energy(AE)公司的 MDX-L12 系列直流電源是一種高性能的磁控管驅(qū)動電源,廣泛應(yīng)用于濺射鍍膜等真空鍍膜工藝中。
主要特點:
高功率輸出:MDX-L12 系列提供高達(dá) 12 kW 的功率輸出,滿足大面積鍍膜和高生產(chǎn)率需求。
精確控制:具備精確的電流、電壓和功率調(diào)節(jié)功能,確保鍍膜過程的穩(wěn)定性和一致性。
優(yōu)異的滅弧性能:采用先進(jìn)的滅弧技術(shù),減少弧光放電對鍍膜質(zhì)量的影響,提高產(chǎn)品良率。
低輸出紋波:輸出紋波低,確保鍍膜層的均勻性和質(zhì)量。
緊湊設(shè)計:結(jié)構(gòu)緊湊,便于集成到現(xiàn)有的真空鍍膜系統(tǒng)中。
應(yīng)用領(lǐng)域:
磁控管濺射:作為磁控管濺射的電源,廣泛應(yīng)用于半導(dǎo)體、光學(xué)和裝飾性鍍膜等領(lǐng)域。
偏壓電源:在射頻濺射和刻蝕系統(tǒng)中,作為偏壓電源使用,提供精確的偏壓控制。
實驗室研究:由于其精確的控制性能和高可靠性,適用于各種研究和開發(fā)應(yīng)用。
MDX-L12 系列直流電源以其高可靠性和優(yōu)異性能,成為真空鍍膜行業(yè)的領(lǐng)先產(chǎn)品,滿足各種復(fù)雜工藝的需求。
英文資料:
The MDX-L12 series DC power supply from Advanced Energy (AE) is a high-performance magnetron drive power supply widely used in vacuum coating processes such as sputtering coating.
Main features:
High power output: The MDX-L12 series provides up to 12 kW of power output, meeting the needs of large-area coating and high productivity.
Precise control: With precise current, voltage, and power regulation functions, it ensures the stability and consistency of the coating process.
Excellent arc extinguishing performance: Advanced arc extinguishing technology is adopted to reduce the impact of arc discharge on coating quality and improve product yield.
Low output ripple: Low output ripple ensures the uniformity and quality of the coating layer.
Compact design: The structure is compact and easy to integrate into existing vacuum coating systems.
Application areas:
Magnetron sputtering: As a power source for magnetron sputtering, it is widely used in fields such as semiconductors, optics, and decorative coatings.
Bias power supply: Used as a bias power supply in RF sputtering and etching systems, providing precise bias control.
Laboratory research: Due to its precise control performance and high reliability, it is suitable for various research and development applications.
The MDX-L12 series DC power supply has become a leading product in the vacuum coating industry due to its high reliability and excellent performance, meeting the needs of various complex processes.
2.產(chǎn) 品 展 示

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