ASYST SMIF LPT2200晶圓傳輸系統(tǒng)

1.產(chǎn) 品 資 料 介 紹：

中文資料：

ASYST SMIF LPT2200 是由 Asyst Technologies 公司推出的一款晶圓傳輸系統(tǒng)，旨在實現(xiàn)半導(dǎo)體制造過程中晶圓的自動化、高效、安全傳輸。

主要特點：

• 高精度傳輸：采用先進(jìn)的運動控制技術(shù)，確保晶圓在傳輸過程中的精確定位和對準(zhǔn)，提高生產(chǎn)效率和產(chǎn)品質(zhì)量。

• 兼容性強：設(shè)計用于集成 SMIF-Pod 晶圓盒的加載和卸載，適用于多種 200mm 和 150mm 晶圓加工和計量設(shè)備。

• 緊湊設(shè)計：結(jié)構(gòu)緊湊，節(jié)省空間，便于集成到現(xiàn)有系統(tǒng)中。

• 用戶友好：配備圖形用戶界面（GUI），操作簡便，易于監(jiān)控和調(diào)整系統(tǒng)參數(shù)。

應(yīng)用領(lǐng)域：

• 半導(dǎo)體制造：用于晶圓的搬運、加載和卸載，確保在加工和計量設(shè)備之間的高效傳輸。

• 計量和檢測：在計量和檢測工具中，實現(xiàn)晶圓的精確傳輸和定位。

• 自動化生產(chǎn)線：在自動化生產(chǎn)線中，實現(xiàn)晶圓的高效傳輸和處理，提高生產(chǎn)效率。

ASYST SMIF LPT2200 以其卓越的性能和可靠性，廣泛應(yīng)用于半導(dǎo)體制造領(lǐng)域，助力企業(yè)實現(xiàn)高效、精確的晶圓傳輸和處理。

英文資料：

ASYST SMIF LPT2200 is a wafer transfer system launched by Asyst Technologies, aimed at achieving automated, efficient, and secure transfer of wafers in the semiconductor manufacturing process.

Main features:

High precision transmission: Adopting advanced motion control technology to ensure precise positioning and alignment of wafers during transmission, improving production efficiency and product quality.

Strong compatibility: Designed for integrated loading and unloading of SMIF Pod wafer boxes, suitable for various 200mm and 150mm wafer processing and metrology equipment.

Compact design: With a compact structure, it saves space and is easy to integrate into existing systems.

User friendly: Equipped with a graphical user interface (GUI), easy to operate, and convenient to monitor and adjust system parameters.

Application areas:

Semiconductor manufacturing: used for wafer handling, loading, and unloading to ensure efficient transfer between processing and measuring equipment.

Measurement and testing: In measurement and testing tools, precise transfer and positioning of wafers are achieved.

Automated production line: In an automated production line, efficient transfer and processing of wafers are achieved to improve production efficiency.

The ASYST SMIF LPT2200 is widely used in the semiconductor manufacturing field due to its excellent performance and reliability, helping enterprises achieve efficient and accurate wafer transfer and processing.

2.產(chǎn)      品      展      示      

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