MKS AX7695PSK-10遠(yuǎn)程等離子源

1.產(chǎn) 品 資 料 介 紹：

中文資料：

MKS AX7695PSK-10 是一款高性能遠(yuǎn)程等離子源，廣泛應(yīng)用于半導(dǎo)體、顯示面板和太陽(yáng)能電池制造中的表面處理和清潔工藝。

主要特點(diǎn)：

• 高效等離子解離：能夠在 1 至 10 托（Torr）范圍內(nèi)提供超過 95% 的氣體解離率，提高工藝效率。
• 高流量處理能力：支持高達(dá) 6.0 slm（標(biāo)準(zhǔn)升每分鐘）的氣體流量，適用于高流量工藝需求。
• 集成式設(shè)計(jì)：內(nèi)置石英真空腔室和射頻電源，結(jié)構(gòu)緊湊，便于直接安裝在工藝腔室上。
• 多氣體兼容性：可處理 O?、N?、H?、H?O 等多種氣體，適用于化學(xué)氣相沉積（CVD）、刻蝕、去膠等工藝。
• 智能控制：支持模擬和 EtherCAT 通信，便于集成到自動(dòng)化控制系統(tǒng)中，實(shí)現(xiàn)精準(zhǔn)控制。

應(yīng)用領(lǐng)域：

• 半導(dǎo)體制造：用于晶圓表面的高密度等離子體處理，提高刻蝕和沉積工藝的均勻性。
• 平板顯示器生產(chǎn)：用于清潔和表面改性，提高顯示器制造良率。
• 太陽(yáng)能電池制造：增強(qiáng)太陽(yáng)能電池的表面處理工藝，提高光電轉(zhuǎn)換效率。

MKS AX7695PSK-10 以其高效、可靠的性能，成為現(xiàn)代高端制造行業(yè)中關(guān)鍵的等離子源設(shè)備之一。

英文資料：

MKS AX7695PSK-10 is a high-performance remote plasma source widely used in surface treatment and cleaning processes in semiconductor, display panel, and solar cell manufacturing.

Main features:

Efficient plasma dissociation: capable of providing over 95% gas dissociation rate in the range of 1 to 10 Torr, improving process efficiency.

High flow processing capability: Supports gas flow rates up to 6.0 slm (standard liters per minute), suitable for high flow process requirements.

Integrated design: Built in quartz vacuum chamber and RF power supply, compact structure, easy to install directly on the process chamber.

Multi gas compatibility: capable of handling various gases such as O ?, N ?, H ?, H ? O, etc., suitable for chemical vapor deposition (CVD), etching, de gluing and other processes.

Intelligent control: Supports simulation and EtherCAT communication, making it easy to integrate into automation control systems and achieve precise control.

Application areas:

Semiconductor manufacturing: used for high-density plasma treatment of wafer surfaces to improve the uniformity of etching and deposition processes.

Flat panel display production: used for cleaning and surface modification to improve display manufacturing yield.

Solar cell manufacturing: Enhance the surface treatment process of solar cells to improve the photoelectric conversion efficiency.

MKS AX7695PSK-10 has become one of the key plasma source equipment in modern high-end manufacturing industry due to its efficient and reliable performance.

2.產(chǎn)      品      展      示      

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