Gasonics A90-039-01電流傳感器
1.產(chǎn) 品 資 料 介 紹:
產(chǎn)品名稱
Gasonics A90-039-01 電流傳感器
(英文:Current Sensor Module)
一、產(chǎn)品概述
Gasonics A90-039-01 是專為 Gasonics 系列等離子體設(shè)備設(shè)計(jì)的 電流檢測(cè)模塊,主要用于監(jiān)測(cè)關(guān)鍵部件(如加熱器、射頻電源、電磁閥等)的電流狀態(tài)。該模塊將實(shí)時(shí)電流信號(hào)轉(zhuǎn)換為模擬信號(hào),傳送至主控系統(tǒng),實(shí)現(xiàn)閉環(huán)控制、狀態(tài)監(jiān)測(cè)和故障保護(hù)。
二、技術(shù)參數(shù)
模塊類型:電流傳感器 / 電流監(jiān)控模塊
典型應(yīng)用電流范圍:0–20 A(具體范圍依據(jù)應(yīng)用負(fù)載)
輸出信號(hào):
模擬輸出(如 0–5V 或 0–10V)
或電流輸出(如 4–20 mA)
檢測(cè)原理:基于霍爾效應(yīng)或變壓器電流互感原理(視具體版本)
絕緣特性:輸入與輸出之間具備電氣隔離
供電電壓:+15V DC / +24V DC(視具體模塊規(guī)格)
響應(yīng)時(shí)間:快速響應(yīng),適合監(jiān)控動(dòng)態(tài)工藝電流
接口類型:多針端子或排線接口,連接至主控板或采集系統(tǒng)
安裝方式:模塊化插板或固定安裝于設(shè)備內(nèi)部電源區(qū)域
英文資料:
product name
Gasonics A90-039-01 Current Sensor
(English: Current Sensor Module)
1、 Product Overview
Gasonics A90-039-01 is a current detection module designed specifically for Gasonics series plasma equipment, mainly used to monitor the current status of key components such as heaters, RF power supplies, solenoid valves, etc. This module converts real-time current signals into analog signals and transmits them to the main control system, achieving closed-loop control, status monitoring, and fault protection.
2、 Technical parameters
Module Type: Current Sensor/Current Monitoring Module
Typical application current range: 0-20 A (specific range depends on the application load)
Output signal:
Analog output (such as 0-5V or 0-10V)
Or current output (such as 4-20 mA)
Detection principle: Based on Hall effect or transformer current mutual inductance principle (depending on the specific version)
Insulation characteristics: Electrical isolation between input and output
Supply voltage:+15V DC/+24V DC (depending on specific module specifications)
Response time: Fast response, suitable for monitoring dynamic process currents
Interface type: Multi pin terminal or ribbon cable interface, connected to the main control board or acquisition system
Installation method: Modular plug-in board or fixed installation in the internal power area of the device
2.產(chǎn) 品 展 示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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