LAM  810-068158-014機器人接口板

1.產(chǎn) 品 資 料 介 紹：

中文資料：

• 產(chǎn)品名稱：節(jié)點機器人接口板

• 型號：810-068158-014

• 制造商：LAM Research

• 設(shè)備類型：接口控制板（用于機器人信號傳輸）

• 典型應(yīng)用：廣泛用于半導(dǎo)體加工設(shè)備中，用于在主控制系統(tǒng)與搬運機器人之間實現(xiàn)信號交互與通訊連接

功能描述

• 提供與機器人執(zhí)行器的通信接口，用于狀態(tài)反饋、動作控制、傳感器輸入輸出管理等

• 支持標準工業(yè)通信協(xié)議（具體協(xié)議需參考設(shè)備文檔或配置）

• 通常配合 LAM 設(shè)備中的晶圓搬運系統(tǒng)使用，確保設(shè)備流程自動化

技術(shù)參數(shù)

• 接口類型：多通道 I/O（輸入輸出）連接

• 供電電壓：通常為 24 VDC（視設(shè)備配置而定）

• 數(shù)據(jù)通信速率：取決于系統(tǒng)通信總線（如 RS-232、RS-485 或以太網(wǎng)）

• 安裝方式：安裝于標準 3U/6U 模塊化控制板卡槽或獨立電控箱內(nèi)

物理參數(shù)

• 尺寸：約 163 × 38 × 58 毫米

• 重量：約 0.4 千克

• 外殼材料：工業(yè)級 PCB 板，抗靜電、抗干擾處理

• 使用環(huán)境：工作溫度 0–50°C，相對濕度 < 85%，無冷凝

特點總結(jié)

• 穩(wěn)定可靠，適用于高精度機器人控制

• 易于集成到 LAM 晶圓處理系統(tǒng)中

• 支持模塊化更換，便于維護

• 具備基本的故障診斷與狀態(tài)指示功能

英文資料：

Product Name: Node Robot Interface Board

Model: 810-068158-014

Manufacturer: LAM Research

Equipment type: Interface control board (for robot signal transmission)

Typical application: Widely used in semiconductor processing equipment to achieve signal interaction and communication connection between the main control system and the handling robot

Function Description

Provide communication interface with robot actuators for state feedback, action control, sensor input-output management, etc

Support standard industrial communication protocols (specific protocols need to refer to equipment documentation or configuration)

Usually used in conjunction with the wafer handling system in LAM equipment to ensure automated equipment processes

Technical Parameter

Interface type: Multi channel I/O (input/output) connection

Supply voltage: typically 24 VDC (depending on equipment configuration)

Data communication rate: depends on the system communication bus (such as RS-232, RS-485, or Ethernet)

Installation method: Installed in the standard 3U/6U modular control board slot or independent control box

Physical parameters

Size: Approximately 163 × 38 × 58 millimeters

Weight: Approximately 0.4 kilograms

Shell material: Industrial grade PCB board, anti-static and anti-interference treatment

Operating environment: Working temperature 0-50 ° C, relative humidity<85%, no condensation

Summary of Characteristics

Stable and reliable, suitable for high-precision robot control

Easy to integrate into LAM wafer processing systems

Support modular replacement for easy maintenance

Having basic fault diagnosis and status indication functions

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