AMAT Applied Materials  0010-09195機(jī)器人組件 

1.產(chǎn) 品 資 料 介 紹：

關(guān)鍵規(guī)格

結(jié)構(gòu)與功能特點(diǎn)

• 高精度運(yùn)動(dòng)鏈：諧波減速器與精密軸承組合，實(shí)現(xiàn) ±0.05mm 重復(fù)定位。
• 潔凈設(shè)計(jì)：機(jī)身表面陽極氧化處理，關(guān)節(jié)密封防顆粒泄漏，適用于 ISO 1 級(jí)潔凈室或真空環(huán)境。
• 模塊化關(guān)節(jié)：各軸可獨(dú)立更換，維護(hù)便捷，縮短停機(jī)時(shí)間。
• 安全互鎖：內(nèi)置限位開關(guān)與碰撞檢測(cè)，確保晶圓與設(shè)備安全。
• 高速度：優(yōu)化軌跡規(guī)劃，實(shí)現(xiàn) 180°/s 關(guān)節(jié)速度，滿足高產(chǎn)能需求。

AMAT Applied Materials 0010-09195機(jī)器人組件  英文資料：

AMAT Applied Materials 0010-09195 is a 6-axis vertical serial robot assembly designed specifically for semiconductor equipment wafer transfer. It is widely used in systems such as P5000 CVD and can stably transport 4 ", 5", and 6 "wafers.

Key specifications

Project Specification Description

Suitable for standard semiconductor wafers with wafer sizes of 4 ", 5", and 6 "

Axis number 6: waist, shoulder, elbow, wrist rotation and pitch

Load capacity ≤ 3kg including end effector

Repeated positioning accuracy ± 0.05mm ensures precise placement of wafers

Maximum motion speed J1: 180 °/s; J6: 360 °/s to meet high beat requirements

The working radius is about 850mm, covering typical process chambers

Vacuum or clean room working environment requires the use of vacuum sealing components

Power supply 24V DC, three-phase AC 200-240V driver and motor power supply

Connect EtherCAT and RS-485 communication interfaces to the device controller

Weight approximately 120kg without packaging

Structural and functional characteristics

High precision motion chain: Harmonic reducer combined with precision bearings to achieve ± 0.05mm repeated positioning.

Clean design: The surface of the body is anodized, and the joints are sealed to prevent particle leakage, suitable for ISO Class 1 clean rooms or vacuum environments.

Modular joints: Each axis can be independently replaced, making maintenance convenient and reducing downtime.

Safety interlock: Built in limit switch and collision detection to ensure the safety of wafers and equipment.

High speed: Optimize trajectory planning to achieve a joint speed of 180 °/s, meeting high production capacity requirements.

 AMAT Applied Materials 0010-09195機(jī)器人組件 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218