AMAT Applied Materials  0190-70060磁鐵驅(qū)動(dòng)器

1.產(chǎn) 品 資 料 介 紹：

核心規(guī)格

工作原理

應(yīng)用場(chǎng)景

• 刻蝕工藝磁場(chǎng)控制：精確調(diào)節(jié)磁場(chǎng)強(qiáng)度與分布，優(yōu)化等離子體密度與均勻性。
• 離子注入聚焦：控制磁透鏡電流，提高離子束聚焦精度。
• 薄膜沉積均勻性優(yōu)化：通過(guò)磁場(chǎng)調(diào)整改善膜厚均勻性。

AMAT Applied Materials  0190-70060磁鐵驅(qū)動(dòng)器  英文資料：

AMAT 0190-70060 is a dual channel high-precision magnet driver mainly used in semiconductor etching equipment (such as P5000, P5200, Centura, Endura) to control magnetic field strength and uniformity, ensuring stable plasma distribution. It controls the output current through a ± 10V analog signal, which can accurately adjust the electromagnetic field and optimize the etching rate and pattern accuracy.

Core specifications

Project Specification Description

Functional positioning: dual independent magnet drive, each can be individually controlled

Input signal ± 10V analog resolution of 12 bits, linearity ± 0.1%

Output current ± 25A continuous; ± 30A peak (10s) current ripple ≤ 100mA RMS

Power input AC 180~240V, 50/60Hz power ≤ 2.5kW

Protection functions include overcurrent, overheating, short circuit, overvoltage, and current deviation protection. Deviation alarm can prevent magnet burnout

Working temperature/humidity -10 ℃~60 ℃; ≤ 80% RH without condensation

Dimensions 235 × 190 × 172mm all steel shell, black spray painted

Weight 5.6kg (excluding bracket)

Installation method: Base fixed hole installation

working principle

The driver receives a ± 10V control signal from the upper computer, and after high-precision D/A conversion and current closed-loop control, outputs a stable ± 25A current to drive the electromagnet. Internally, intelligent power module (IPM) is used, integrating overcurrent, overheating, and short circuit protection to ensure rapid output shutdown in case of abnormal conditions and prevent equipment damage. The newly added current deviation protection function can monitor the deviation between the output current and the given value in real time. If it exceeds the threshold, an alarm will be triggered and the machine will be shut down to avoid a decrease in etching uniformity or equipment damage caused by magnet failure.

 AMAT Applied Materials 0190-70060磁鐵驅(qū)動(dòng)器  產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218