AMAT  0100-01341電源模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT 0100-01341 電源模塊

產(chǎn)品概述

AMAT（Applied Materials）0100-01341 電源模塊是一種用于半導(dǎo)體制造設(shè)備的關(guān)鍵電氣供能單元，用于為設(shè)備內(nèi)部各功能模塊提供穩(wěn)定、可靠的直流或交流電源。它通常集成在控制箱、底盤(pán)控制箱或獨(dú)立電源柜中，為加熱器、泵浦、氣動(dòng)閥門(mén)、射頻模塊、控制器等關(guān)鍵子模塊供電，確保設(shè)備穩(wěn)定運(yùn)行和工藝精度。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠(chǎng)資料）

• 輸入電源：工業(yè)標(biāo)準(zhǔn) AC 電源

• 輸出類(lèi)型：直流/交流電源輸出，多路可調(diào)

• 額定功率：滿(mǎn)足高功率工藝模塊需求

• 保護(hù)功能：過(guò)流、過(guò)壓、短路保護(hù)

• 接口：與控制系統(tǒng)及互鎖系統(tǒng)連接，實(shí)現(xiàn)遠(yuǎn)程監(jiān)控

• 安裝方式：模塊化設(shè)計(jì)，便于集成、維護(hù)和更換

• 環(huán)境適應(yīng)性：耐高溫、耐振動(dòng)，適應(yīng)潔凈室工藝環(huán)境

應(yīng)用場(chǎng)景

1. 控制器與底盤(pán)控制箱供電

   • 提供穩(wěn)定電源給控制器、PCB、互鎖模塊

   • 保證內(nèi)部電子模塊正常運(yùn)行

2. 沉積工藝（CVD/PVD/ALD）

   • 為加熱器、泵浦、氣體閥門(mén)提供高精度電源

   • 支持薄膜沉積過(guò)程的溫度和流量控制

3. 刻蝕工藝設(shè)備

   • 為射頻模塊、壓力傳感器、流量控制模塊供電

   • 保證刻蝕功率和氣體控制穩(wěn)定

4. 離子注入系統(tǒng)

   • 提供離子源、掃描系統(tǒng)及束流監(jiān)測(cè)模塊的電力

   • 確保注入劑量和均勻性一致

5. 工廠(chǎng)自動(dòng)化與安全系統(tǒng)

   • 與互鎖及監(jiān)控系統(tǒng)配合，實(shí)現(xiàn)設(shè)備異常斷電保護(hù)

   • 提高操作安全性和工藝連續(xù)性

AMAT   0100-01341電源模塊 英文資料：

AMAT 0100-01341 power module

Product Overview

The AMAT (Applied Materials) 0100-01341 power module is a critical electrical power supply unit used in semiconductor manufacturing equipment to provide stable and reliable DC or AC power to various functional modules inside the equipment. It is usually integrated into the control box, chassis control box, or independent power cabinet, providing power to key sub modules such as heaters, pumps, pneumatic valves, RF modules, controllers, etc., ensuring stable equipment operation and process accuracy.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input power supply: Industrial standard AC power supply

Output type: DC/AC power output, multiple adjustable channels

Rated power: meets the requirements of high-power process modules

Protection function: overcurrent, overvoltage, short circuit protection

Interface: Connect with the control system and interlock system to achieve remote monitoring

Installation method: Modular design for easy integration, maintenance, and replacement

Environmental adaptability: high temperature resistance, vibration resistance, suitable for clean room process environment

Application scenarios

Controller and chassis control box power supply

Provide stable power supply to the controller PCB、 Interlocking module

Ensure the normal operation of internal electronic modules

Deposition process (CVD/PVD/ALD)

Provide high-precision power supply for heaters, pumps, and gas valves

Support temperature and flow control during thin film deposition process

Etching process equipment

Power supply for RF module, pressure sensor, and flow control module

Ensure stable etching power and gas control

Ion implantation system

Provide power for ion source, scanning system, and beam monitoring module

Ensure consistent injection dose and uniformity

Factory Automation and Safety Systems

Cooperate with interlocking and monitoring systems to achieve equipment abnormal power-off protection

Improve operational safety and process continuity

AMAT  0100-01341電源模塊 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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