AMAT DIP-510-005互鎖模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT DIP-510-005 互鎖模塊

產(chǎn)品應(yīng)用領(lǐng)域

1. 半導(dǎo)體制造設(shè)備

   • 用于集成電路（IC）生產(chǎn)過程中，對光刻機(jī)、刻蝕機(jī)、CVD、PVD 等關(guān)鍵工藝設(shè)備的安全互鎖。

   • 確保設(shè)備在氣路、真空、溫度、壓力等異常狀態(tài)下實(shí)現(xiàn)緊急保護(hù)和互鎖停機(jī)。

2. 工廠自動化與安全聯(lián)鎖

   • 適用于晶圓廠的中央控制系統(tǒng)，通過互鎖模塊實(shí)現(xiàn)設(shè)備與設(shè)備之間的安全聯(lián)動。

   • 防止設(shè)備超規(guī)格運(yùn)行，保障生產(chǎn)連續(xù)性與人員安全。

3. 真空與氣體控制系統(tǒng)

   • 在高純氣體輸送、真空腔室控制等系統(tǒng)中，起到信號監(jiān)控與安全隔離作用。

   • 保證氣體供應(yīng)、抽真空等環(huán)節(jié)在聯(lián)鎖邏輯下安全執(zhí)行。

4. 電源與工藝保護(hù)

   • 作為設(shè)備電源控制和工藝執(zhí)行的安全屏障，防止在異常條件下繼續(xù)供電或執(zhí)行危險(xiǎn)工藝。

   • 廣泛用于設(shè)備的開/關(guān)機(jī)順序控制與緊急切斷。

5. 高可靠性實(shí)驗(yàn)與檢測平臺

   • 應(yīng)用于半導(dǎo)體工藝實(shí)驗(yàn)平臺或研發(fā)裝置，提供安全聯(lián)鎖與測試保護(hù)，避免誤操作帶來損失。

AMAT DIP-510-005互鎖模塊英文資料：

AMAT DIP-510-005 Interlock Module

Product application areas

Semiconductor Manufacturing Equipment

Used for the safety interlock of key process equipment such as lithography machines, etching machines, CVD, PVD, etc. in the production process of integrated circuits (ICs).

Ensure that the equipment achieves emergency protection and interlock shutdown in case of abnormal conditions such as gas path, vacuum, temperature, pressure, etc.

Factory automation and safety interlocking

A central control system suitable for wafer fabs, which achieves secure linkage between devices through interlocking modules.

Prevent equipment from operating beyond specifications, ensure production continuity and personnel safety.

Vacuum and gas control system

In systems such as high-purity gas transportation and vacuum chamber control, it plays a role in signal monitoring and safety isolation.

Ensure safe execution of gas supply, vacuum pumping and other processes under interlocking logic.

Power supply and process protection

As a safety barrier for equipment power control and process execution, it prevents the continuation of power supply or the execution of hazardous processes under abnormal conditions.

Widely used for on/off sequence control and emergency shutdown of equipment.

High reliability experimental and testing platform

Applied to semiconductor process experimental platforms or R&D devices, providing safety interlock and testing protection to avoid losses caused by misoperation.

AMAT DIP-510-005互鎖模塊 產(chǎn)品展示      

 產(chǎn)品視頻

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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