AMAT  1007-0016控制器模塊

1.產(chǎn) 品 資 料 介 紹：

中文資料：

AMAT 1007-0016 控制器模塊技術(shù)說(shuō)明

1. 基本信息

• 型號(hào)：1007-0016

• 制造商：Applied Materials（應(yīng)用材料公司）

• 設(shè)備類型：半導(dǎo)體設(shè)備專用控制器

• 適用設(shè)備：主要應(yīng)用于200mm/300mm晶圓處理系統(tǒng)

2. 核心功能

• 設(shè)備主控制系統(tǒng)核心組件

• 負(fù)責(zé)設(shè)備邏輯控制和時(shí)序管理

• 與各子系統(tǒng)（傳輸/工藝/檢測(cè)）通信協(xié)調(diào)

3. 典型應(yīng)用

• 晶圓傳輸系統(tǒng)控制

• 工藝設(shè)備時(shí)序管理

• 設(shè)備安全聯(lián)鎖控制

4. 技術(shù)特點(diǎn)

• 采用實(shí)時(shí)操作系統(tǒng)（VxWorks）

• 支持SECS/GEM通信協(xié)議

• 內(nèi)置設(shè)備狀態(tài)監(jiān)控功能

• 雙冗余電源設(shè)計(jì)

5. 維護(hù)要點(diǎn)

1. 日常檢查：

   • 確認(rèn)狀態(tài)指示燈（LED）正常

   • 檢查散熱風(fēng)扇運(yùn)轉(zhuǎn)情況

   • 記錄控制器運(yùn)行日志

2. 故障處理：

   • 發(fā)生故障時(shí)優(yōu)先保存系統(tǒng)日志

   • 檢查背板連接器接觸狀態(tài)

   • 驗(yàn)證供電電源穩(wěn)定性（24VDC ±5%）

3. 更換步驟：

   • 停機(jī)后斷開所有連接線

   • 記錄原有跳線設(shè)置

   • 新模塊需加載備份配置文件

英文資料：

AMAT 1007-0016 Controller Module Technical Description

1. Basic information

Model: 1007-0016

Manufacturer: Applied Materials

Equipment type: Semiconductor equipment dedicated controller

Applicable equipment: mainly used in 200mm/300mm wafer processing systems

2. Core functions

Core components of the equipment main control system

Responsible for equipment logic control and timing management

Coordinate communication with various subsystems (transmission/process/detection)

3. Typical applications

Wafer transfer system control

Process equipment timing management

Equipment safety interlock control

4. Technical features

Adopting real-time operating system (VxWorks)

Support SECS/GEM communication protocol

Built in device status monitoring function

Dual redundant power supply design

5. Maintenance points

Daily inspection:

Confirm that the status indicator light (LED) is functioning properly

Check the operation of the cooling fan

Record the operation log of the controller

Fault handling:

Prioritize saving system logs in the event of a malfunction

Check the contact status of the backplane connector

Verify the stability of the power supply (24VDC ± 5%)

Replacement steps:

Disconnect all connecting wires after shutdown

Record the original jumper settings

New module needs to load backup configuration file

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