AMAT 1070-01020氣體監(jiān)測儀
1.產(chǎn) 品 資 料 介 紹:
中文資料:
AMAT 1070-01020 是應(yīng)用材料公司(Applied Materials)生產(chǎn)的一款氣體監(jiān)測儀,主要用于半導(dǎo)體制造過程中對氣體流量和濃度的實(shí)時(shí)監(jiān)測。該設(shè)備確保關(guān)鍵工藝氣體的準(zhǔn)確供應(yīng),保障生產(chǎn)過程的穩(wěn)定性和產(chǎn)品質(zhì)量。
主要功能:
氣體流量監(jiān)測:實(shí)時(shí)檢測氣體流量,確保供應(yīng)符合工藝要求。
氣體濃度分析:分析氣體中的成分比例,確保工藝氣體的純度和準(zhǔn)確性。
數(shù)據(jù)記錄與報(bào)警:記錄監(jiān)測數(shù)據(jù),并在檢測到異常時(shí)發(fā)出報(bào)警,便于及時(shí)采取措施。
應(yīng)用領(lǐng)域:
半導(dǎo)體制造:在晶圓加工過程中,精確控制氣體供應(yīng)對于刻蝕、沉積等工藝至關(guān)重要。
顯示面板生產(chǎn):在液晶顯示器(LCD)和有機(jī)發(fā)光二極管(OLED)面板的制造中,氣體監(jiān)測確保顯示效果和質(zhì)量。
太陽能電池生產(chǎn):在光伏產(chǎn)業(yè)中,氣體監(jiān)測有助于優(yōu)化電池效率和性能。
通過使用 AMAT 1070-01020 氣體監(jiān)測儀,制造商能夠提高生產(chǎn)過程的可控性和一致性,確保產(chǎn)品質(zhì)量并減少生產(chǎn)風(fēng)險(xiǎn)。
英文資料:
AMAT 1070-01020 is a gas monitoring instrument produced by Applied Materials, mainly used for real-time monitoring of gas flow rate and concentration in semiconductor manufacturing processes. This equipment ensures the accurate supply of key process gases, guaranteeing the stability of the production process and product quality.
Main functions:
Gas flow monitoring: Real time detection of gas flow to ensure supply meets process requirements.
Gas concentration analysis: Analyze the proportion of components in the gas to ensure the purity and accuracy of the process gas.
Data recording and alarm: Record monitoring data and issue alarms when anomalies are detected, facilitating timely action.
Application areas:
Semiconductor manufacturing: Accurate control of gas supply is crucial for processes such as etching and deposition during wafer processing.
Display panel production: In the manufacturing of liquid crystal displays (LCD) and organic light-emitting diode (OLED) panels, gas monitoring ensures display performance and quality.
Solar cell production: In the photovoltaic industry, gas monitoring helps optimize cell efficiency and performance.
By using the AMAT 1070-01020 gas monitor, manufacturers can improve the controllability and consistency of the production process, ensure product quality, and reduce production risks.
2.產(chǎn) 品 展 示

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