ZYGO 7702 BH5-6314激光頭

1.產(chǎn) 品 資 料 介 紹：

中文資料：

ZYGO 7702 BH5-6314 激光頭是一款高精度的雙頻氦氖激光干涉測量光源，主要用于精密測量和位移跟蹤。其應(yīng)用領(lǐng)域廣泛，涵蓋半導(dǎo)體制造、精密機加工、計量校準(zhǔn)等高要求行業(yè)。以下是其主要應(yīng)用領(lǐng)域和詳細(xì)介紹：

1. 半導(dǎo)體制造與光刻工藝

在半導(dǎo)體行業(yè)，納米級的測量精度至關(guān)重要，ZYGO 7702 BH5-6314 激光頭在以下方面發(fā)揮關(guān)鍵作用：

• 光刻機對準(zhǔn)：用于晶圓對準(zhǔn)和位置反饋，確保每一層電路圖案的精確疊加。
• 晶圓定位與運動控制：監(jiān)測晶圓臺的納米級移動，提高曝光精度。
• 掩模對準(zhǔn)：用于光掩模版的精準(zhǔn)定位，減少誤差。
• 晶圓平整度檢測：用于測量晶圓的翹曲度，優(yōu)化生產(chǎn)工藝。

2. 精密計量與干涉測量

ZYGO 激光頭廣泛用于精密干涉測量儀器，如白光干涉儀、輪廓測量儀等，適用于：

• 納米級長度測量：在計量實驗室用于高精度長度基準(zhǔn)測量，如校準(zhǔn)量塊、尺子、干涉儀等。
• 表面形貌檢測：檢測光學(xué)元件、鏡片、玻璃基板的表面粗糙度和形狀誤差。
• 非接觸式測量：避免傳統(tǒng)機械測量的誤差，提高測量精度。

3. 精密機械加工與CNC控制

高端機床、CNC 設(shè)備等制造系統(tǒng)需要高精度反饋系統(tǒng)，ZYGO 7702 BH5-6314 可用于：

• 數(shù)控機床的高精度位置反饋：如五軸加工中心、超精密車削機床。
• 刀具位移監(jiān)測：確保刀具在納米級精度內(nèi)切削，提高加工一致性。
• 零件尺寸控制：用于在線檢測，確保加工零件符合公差要求。

4. 光學(xué)元件制造與檢測

在高端光學(xué)制造領(lǐng)域，該激光頭被用于測量透鏡、反射鏡、光纖等的表面質(zhì)量和光學(xué)參數(shù)：

• 激光干涉儀：測量透鏡、棱鏡、反射鏡的表面平整度。
• 自由曲面檢測：如車燈透鏡、投影鏡頭等高精度光學(xué)器件的檢測。
• 玻璃和顯示面板測量：用于OLED、LCD 面板的翹曲度和厚度測量。

英文資料：

ZYGO 7702 BH5-6314 laser head is a high-precision dual frequency helium neon laser interferometric measurement light source, mainly used for precision measurement and displacement tracking. It has a wide range of applications, covering high demand industries such as semiconductor manufacturing, precision machining, and metrology calibration. The following are its main application areas and detailed introduction:

1. Semiconductor manufacturing and photolithography process

In the semiconductor industry, nanoscale measurement accuracy is crucial, and the ZYGO 7702 BH5-6314 laser head plays a key role in the following aspects:

Lithography machine alignment: used for wafer alignment and position feedback to ensure precise stacking of each layer circuit pattern.

Wafer positioning and motion control: Monitor the nanoscale movement of the wafer stage to improve exposure accuracy.

Mask alignment: used for precise positioning of photomask templates to reduce errors.

Wafer flatness detection: used to measure the warpage of wafers and optimize production processes.

2. Precision metrology and interferometry

ZYGO laser heads are widely used in precision interferometric measuring instruments, such as white light interferometers, contour measuring instruments, etc., and are suitable for:

Nanoscale length measurement: used in metrology laboratories for high-precision length benchmark measurement, such as calibration blocks, rulers, interferometers, etc.

Surface morphology detection: detecting the surface roughness and shape errors of optical components, lenses, and glass substrates.

Non contact measurement: avoids the errors of traditional mechanical measurement and improves measurement accuracy.

3. Precision machining and CNC control

High precision feedback systems are required for manufacturing systems such as high-end machine tools and CNC equipment. ZYGO 7702 BH5-6314 can be used for:

High precision position feedback for CNC machine tools, such as five axis machining centers and ultra precision turning machines.

Tool displacement monitoring: Ensure that the tool cuts with nanometer level accuracy, improving machining consistency.

Part size control: used for online inspection to ensure that processed parts meet tolerance requirements.

4. Manufacturing and testing of optical components

In the field of high-end optical manufacturing, this laser head is used to measure the surface quality and optical parameters of lenses, mirrors, fibers, etc

Laser interferometer: measures the surface flatness of lenses, prisms, and mirrors.

Free surface detection: detection of high-precision optical components such as car headlight lenses and projection lenses.

Glass and display panel measurement: used for measuring the warpage and thickness of OLED and LCD panels.

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